Fabrication and resonant behavior of PZT thick film cantilever for BioChip

Hyung Joon Kim; Yong Bum Kim; Ji Yoon Kang; Tab Song Kim

doi:10.1080/743817676

Fabrication and resonant behavior of PZT thick film cantilever for BioChip

Hyung Joon Kim, Yong Bum Kim, Ji Yoon Kang, Tab Song Kim

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

PZT(52/48) thick films with an Pb-based complex oxide (PCW) additive were prepared on Pt/TiO₂/YSZ/SiO₂/Si substrate by new hybrid method based on the screen printing. It is found that solinfiltration for thick films fabrication process significantly improves the electrical properties due to the improved structural compactness. By applying these high quality piezoelectric thick films on micro cantilever devices, a highly sensitive thick film cantilever for mass(ng-□) detection devices is successfully fabricated. Resonant frequency and displacement of PZT-0.12PCW thick film cantilever for biochip are measured by laser vibrometer system as a function of cantilever size (width, length). We change the added mass from 4ng to 5 D through Au deposition. The shorter cantilever is more sensitive for mass change and it is found that the sensitivity of cantilever decreases due to viscous damping effect in liquid. Finally, the application of these PZT-0.12PCW thick film cantilever devices to a protein detector is discussed.

Original language	English (US)
Pages (from-to)	11-20
Number of pages	10
Journal	Integrated Ferroelectrics
Volume	50
DOIs	https://doi.org/10.1080/743817676
State	Published - 2002
Externally published	Yes

Keywords

Biochip
Cantilever
PZT
Thick film

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Ceramics and Composites
Materials Chemistry
Electrical and Electronic Engineering
Control and Systems Engineering

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10.1080/743817676

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title = "Fabrication and resonant behavior of PZT thick film cantilever for BioChip",

abstract = "PZT(52/48) thick films with an Pb-based complex oxide (PCW) additive were prepared on Pt/TiO2/YSZ/SiO2/Si substrate by new hybrid method based on the screen printing. It is found that solinfiltration for thick films fabrication process significantly improves the electrical properties due to the improved structural compactness. By applying these high quality piezoelectric thick films on micro cantilever devices, a highly sensitive thick film cantilever for mass(ng-□) detection devices is successfully fabricated. Resonant frequency and displacement of PZT-0.12PCW thick film cantilever for biochip are measured by laser vibrometer system as a function of cantilever size (width, length). We change the added mass from 4ng to 5 D through Au deposition. The shorter cantilever is more sensitive for mass change and it is found that the sensitivity of cantilever decreases due to viscous damping effect in liquid. Finally, the application of these PZT-0.12PCW thick film cantilever devices to a protein detector is discussed.",

keywords = "Biochip, Cantilever, PZT, Thick film",

author = "Kim, {Hyung Joon} and Kim, {Yong Bum} and Kang, {Ji Yoon} and Kim, {Tab Song}",

year = "2002",

doi = "10.1080/743817676",

language = "English (US)",

volume = "50",

pages = "11--20",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

publisher = "Taylor and Francis Ltd.",

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T1 - Fabrication and resonant behavior of PZT thick film cantilever for BioChip

AU - Kim, Hyung Joon

AU - Kim, Yong Bum

AU - Kang, Ji Yoon

AU - Kim, Tab Song

PY - 2002

Y1 - 2002

N2 - PZT(52/48) thick films with an Pb-based complex oxide (PCW) additive were prepared on Pt/TiO2/YSZ/SiO2/Si substrate by new hybrid method based on the screen printing. It is found that solinfiltration for thick films fabrication process significantly improves the electrical properties due to the improved structural compactness. By applying these high quality piezoelectric thick films on micro cantilever devices, a highly sensitive thick film cantilever for mass(ng-□) detection devices is successfully fabricated. Resonant frequency and displacement of PZT-0.12PCW thick film cantilever for biochip are measured by laser vibrometer system as a function of cantilever size (width, length). We change the added mass from 4ng to 5 D through Au deposition. The shorter cantilever is more sensitive for mass change and it is found that the sensitivity of cantilever decreases due to viscous damping effect in liquid. Finally, the application of these PZT-0.12PCW thick film cantilever devices to a protein detector is discussed.

AB - PZT(52/48) thick films with an Pb-based complex oxide (PCW) additive were prepared on Pt/TiO2/YSZ/SiO2/Si substrate by new hybrid method based on the screen printing. It is found that solinfiltration for thick films fabrication process significantly improves the electrical properties due to the improved structural compactness. By applying these high quality piezoelectric thick films on micro cantilever devices, a highly sensitive thick film cantilever for mass(ng-□) detection devices is successfully fabricated. Resonant frequency and displacement of PZT-0.12PCW thick film cantilever for biochip are measured by laser vibrometer system as a function of cantilever size (width, length). We change the added mass from 4ng to 5 D through Au deposition. The shorter cantilever is more sensitive for mass change and it is found that the sensitivity of cantilever decreases due to viscous damping effect in liquid. Finally, the application of these PZT-0.12PCW thick film cantilever devices to a protein detector is discussed.

KW - Biochip

KW - Cantilever

KW - PZT

KW - Thick film

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JO - Integrated Ferroelectrics

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ER -

Fabrication and resonant behavior of PZT thick film cantilever for BioChip

Abstract

Keywords

ASJC Scopus subject areas

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