Fabrication of 2-D and 3-D photonic bandgap structures using laser-assisted imprinting of self-assembled particles

Y. F. Lu, L. P. Li, K. K. Mendu, J. Shi, D. W. Doerr, D. R. Alexander

Research output: Contribution to journalConference articlepeer-review

Abstract

Fabrication of 2-D and 3-D photonic bandgap (PBG) structures on silicon substrates using laser-assisted nanoimprinting of silica particles has been investigated. Monolayers of silica particles, with different diameters ranging from 160 nm to 5 μm, were deposited on silicon substrates by self-assembly. A quartz plate, which is transparent to the laser wavelength of 248 nm, was tightly placed on the substrate surface. A KrF excimer laser beam with the wavelength of 248 nm was vertically irradiated on the quartz/nanoparticle/ silicon structure. The silica particles were imprinted into silicon substrates by the quartz to form a 2-D PBG structure due to the transient Si surface melting during the laser pulse. 3-D PBG structures can be fabricated by directly imprinting multilayer self-assembled silica particles into Si substrates. They can also be fabricated by repeating a process cycle of silica nanoparticles self-assembly, amorphous Si layer deposition, and simultaneous laser melting, imprinting and recrystallization.

Original languageEnglish (US)
Article numberR2.5
Pages (from-to)277-288
Number of pages12
JournalMaterials Research Society Symposium Proceedings
Volume820
DOIs
StatePublished - 2004
EventNanoengineered Assemblies and Advanced Micro/Nanosystems - San Francisco, CA, United States
Duration: Apr 13 2004Apr 16 2004

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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