Fabrication of large arrays of micron-scale magnetic features by selective area organometallic chemical vapor deposition

D. Welipitiya, Y. L. He, Jiandi Zhang, P. I. Oden, T. Thundat, R. J. Warmack, Ismail Gobulukoglu, Z. S. Shan, D. J. Sellmyer, P. A. Dowben

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

We demonstrate that it is possible to deposit a wide range of magnetic features, using photoassisted selective area organometallic chemical vapor deposition. Large arrays of identical micron-scale Ni features were deposited on a Si(111) wafer by this method. Their magnetic properties were studied by alternating gradient force magnetometry as well as magnetic force microscopy. Our morphological and magnetic measurements show that the structures are spatially well defined, and the magnetic properties are related to the structural shapes of the features. This method can be adapted to the fabrication of smaller-scale magnetic and electronic devices.

Original languageEnglish (US)
Pages (from-to)1867-1871
Number of pages5
JournalJournal of Applied Physics
Volume80
Issue number3
DOIs
StatePublished - Aug 1 1996

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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