@inproceedings{8ff2c4343bda4b368910a1061b84f7b8,
title = "Fabrication of pillar-structured thermal neutron detectors",
abstract = "Pillar detector is an innovative solid state device structure that leverages advanced semiconductor fabrication technology to produce a device for thermal neutron detection. State-of-the-art thermal neutron detectors have shortcomings in achieving simultaneously high efficiency, low operating voltage while maintaining adequate fieldability performance. By using a 3-dimensional silicon PIN diode pillar array filled with isotopic boron 10, (10B) a high efficiency device is theoretically possible. The fabricated pillar structures reported in this work are composed of 2 μm diameter silicon pillars with a 4 μm pitch and pillar heights of 6 and 12 μm. The pillar detector with a 12 μm height achieved a thermal neutron detection efficiency of 7.3% at 2V.",
author = "Nikoli{\'c}, {Rebecca J.} and Conway, {Adam M.} and Reinhardt, {Catherine E.} and Graff, {Robert T.} and Wang, {Tzu Fang} and Nirmalendu Deo and Cheung, {Chin Li}",
year = "2007",
doi = "10.1109/NSSMIC.2007.4437299",
language = "English (US)",
isbn = "1424409233",
series = "IEEE Nuclear Science Symposium Conference Record",
pages = "1577--1580",
booktitle = "2007 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS-MIC",
note = "2007 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS-MIC ; Conference date: 27-10-2007 Through 03-11-2007",
}