Free-carrier and phonon properties of n- and p-type hexagonal GaN films measured by infrared ellipsometry

A. Kasic, M. Schubert, S. Einfeldt, D. Hommel, T. E. Tiwald

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251 Scopus citations


Infrared spectroscopic ellipsometry (IRSE) over the wave-number range from 300 to 1200 cm-1 is used to determine the anisotropic room-temperature optical properties of highly resistive, Si-doped n-type and Mg-doped p-type α-GaN, The approximately 1-μm-thick films were deposited on c-plane sapphire by molecular beam epitaxy without a buffer layer. The free-carrier concentrations are obtained from Hall measurements. The IRSE data are analyzed through model calculations of the infrared optical dielectric functions parallel (∥) and perpendicular (⊥) to the c axis of the α-GaN films. We obtain the thin-film phonon frequencies and broadening values and the optical mobility and effective-mass parameters for n- and p-type α-GaN. In agreement with Perlin et al. [Appl. Phys. Lett. 68, 1114 (1996)] we determine the effective electron masses as me,⊥/m0 = 0.237 ± 0.006 and me,∥/m0 = 0.228 ± 0.008. For p-type GaN with hole concentration Nh = 8 × 1017 cm-3 we find mh/m0= 1.40 ± 0.33, which agrees with recent theoretical studies of the Rashba-Sheka-Pikus parameters in wurtzite GaN. However, no substantial anisotropy of the effective hole mass is obtained to within 25%. The ellipsometry data also allow for derivation of the model quantities εx, j(j=⊥,∥), which are almost isotropic but may vary between 4.92 and 5.37 depending on whether the films are undoped or doped. In heavily-Sidoped n-type α-GaN we observe a thin carrier-depleted surface layer and additional infrared-active vibrational modes at 574, 746, and 851 cm-1. Raman measurements of the GaN films are also performed, and the results are compared to those obtained from the IRSE investigations.

Original languageEnglish (US)
Pages (from-to)7365-7377
Number of pages13
JournalPhysical Review B - Condensed Matter and Materials Physics
Issue number11
StatePublished - Sep 15 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics


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