Fundamentals and applications of variable angle spectroscopic ellipsometry

John A. Woollam, Paul G. Snyder

Research output: Contribution to journalArticle

63 Scopus citations


Being able to accurately select the angle of incidence and spectral range for measurements makes ellipsometry a very powerful tool for materials, surface and interface analysis. The technique is fast, totally computer automated and can be performed at atmospheric pressure. It is totally non-invasive and is sensitive to fractions of atom layer thicknesses. We illustrate the power of variable angle spectroscopic ellipsometry with three examples: optical coatings; surface roughness and wetting; electric field effects in semiconductor studies.

Original languageEnglish (US)
Pages (from-to)279-283
Number of pages5
JournalMaterials Science and Engineering B
Issue number2
StatePublished - Jan 1990

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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