Fundamentals and applications of variable angle spectroscopic ellipsometry

John A. Woollam; Paul G. Snyder

doi:10.1016/0921-5107(90)90069-N

Fundamentals and applications of variable angle spectroscopic ellipsometry

John A. Woollam, Paul G. Snyder

Electrical & Computer Engineering

Research output: Contribution to journal › Article › peer-review

76 Scopus citations

Abstract

Being able to accurately select the angle of incidence and spectral range for measurements makes ellipsometry a very powerful tool for materials, surface and interface analysis. The technique is fast, totally computer automated and can be performed at atmospheric pressure. It is totally non-invasive and is sensitive to fractions of atom layer thicknesses. We illustrate the power of variable angle spectroscopic ellipsometry with three examples: optical coatings; surface roughness and wetting; electric field effects in semiconductor studies.

Original language	English (US)
Pages (from-to)	279-283
Number of pages	5
Journal	Materials Science and Engineering B
Volume	5
Issue number	2
DOIs	https://doi.org/10.1016/0921-5107(90)90069-N
State	Published - Jan 1990

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Fundamentals and applications of variable angle spectroscopic ellipsometry",

abstract = "Being able to accurately select the angle of incidence and spectral range for measurements makes ellipsometry a very powerful tool for materials, surface and interface analysis. The technique is fast, totally computer automated and can be performed at atmospheric pressure. It is totally non-invasive and is sensitive to fractions of atom layer thicknesses. We illustrate the power of variable angle spectroscopic ellipsometry with three examples: optical coatings; surface roughness and wetting; electric field effects in semiconductor studies.",

author = "Woollam, {John A.} and Snyder, {Paul G.}",

note = "Funding Information: We are indebted to numerous colleagues, collaborators and students who have participated in these VASE studies over the years. Grant support has come from the National Aeronautics and Space Administration (NASA) Grant NAG3-154, the BOC Group, Inc., Control Data Corporation and the U.S. Army Materials Technology Laboratory.",

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doi = "10.1016/0921-5107(90)90069-N",

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T1 - Fundamentals and applications of variable angle spectroscopic ellipsometry

AU - Woollam, John A.

AU - Snyder, Paul G.

N1 - Funding Information: We are indebted to numerous colleagues, collaborators and students who have participated in these VASE studies over the years. Grant support has come from the National Aeronautics and Space Administration (NASA) Grant NAG3-154, the BOC Group, Inc., Control Data Corporation and the U.S. Army Materials Technology Laboratory.

PY - 1990/1

Y1 - 1990/1

N2 - Being able to accurately select the angle of incidence and spectral range for measurements makes ellipsometry a very powerful tool for materials, surface and interface analysis. The technique is fast, totally computer automated and can be performed at atmospheric pressure. It is totally non-invasive and is sensitive to fractions of atom layer thicknesses. We illustrate the power of variable angle spectroscopic ellipsometry with three examples: optical coatings; surface roughness and wetting; electric field effects in semiconductor studies.

AB - Being able to accurately select the angle of incidence and spectral range for measurements makes ellipsometry a very powerful tool for materials, surface and interface analysis. The technique is fast, totally computer automated and can be performed at atmospheric pressure. It is totally non-invasive and is sensitive to fractions of atom layer thicknesses. We illustrate the power of variable angle spectroscopic ellipsometry with three examples: optical coatings; surface roughness and wetting; electric field effects in semiconductor studies.

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Fundamentals and applications of variable angle spectroscopic ellipsometry

Abstract

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