Generalized ellipsometry effective medium approximation analysis approach for porous slanted columnar thin films infiltrated with polymer

D. Liang, D. Schmidt, H. Wang, E. Schubert, M. Schubert

Research output: Contribution to journalArticle

14 Scopus citations

Abstract

We report on using a generalized ellipsometry effective medium approximation approach to determine the changes of structural and optical properties of highly porous slanted columnar thin films upon polymer infiltration. The obtained film thickness and columnar slanting angle show a difference after infiltration, which are in good agreement with scanning electron microscopy analysis. The approach effectively identifies the changes in birefringence and dichroism upon infiltration, and provides constituent fractions consistent with the performed experiments. The approach presented here will become useful for optical characterization of slanted columnar thin films.

Original languageEnglish (US)
Article number111906
JournalApplied Physics Letters
Volume103
Issue number11
DOIs
StatePublished - Sep 9 2013

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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