Generalized ellipsometry for monoclinic absorbing materials: determination of optical constants of Cr columnar thin films

D. Schmidt; B. Booso; T. Hofmann; E. Schubert; A. Sarangan; M. Schubert

doi:10.1364/OL.34.000992

Generalized ellipsometry for monoclinic absorbing materials: determination of optical constants of Cr columnar thin films

D. Schmidt, B. Booso, T. Hofmann, E. Schubert, A. Sarangan, M. Schubert

Electrical & Computer Engineering

Research output: Contribution to journal › Article › peer-review

60 Scopus citations

Abstract

Generalized spectroscopic ellipsometry is used to determine the form-induced birefringence and monoclinic optical constants of chromium columnar thin films. The slanted nanocolumns were deposited by glancing angle deposition under 85° incidence and are tilted from the surface normal. Dichroism measured for wavelengths from 400 to 1000 nm renders the Cr nanocolumns monoclinic absorbing crystals with c axis along the nanocolumns axis, b axis parallel to the film interface, and 74.8° monoclinic angle between a and c axes. The columnar thin film reveals anomalous optical dispersion, extreme birefringence, and strong dichroism and differs entirely from bulk chromium.

Original language	English (US)
Pages (from-to)	992-994
Number of pages	3
Journal	Optics Letters
Volume	34
Issue number	7
DOIs	https://doi.org/10.1364/OL.34.000992
State	Published - Apr 1 2009

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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AU - Schmidt, D.

AU - Booso, B.

AU - Hofmann, T.

AU - Schubert, E.

AU - Sarangan, A.

AU - Schubert, M.

PY - 2009/4/1

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AB - Generalized spectroscopic ellipsometry is used to determine the form-induced birefringence and monoclinic optical constants of chromium columnar thin films. The slanted nanocolumns were deposited by glancing angle deposition under 85° incidence and are tilted from the surface normal. Dichroism measured for wavelengths from 400 to 1000 nm renders the Cr nanocolumns monoclinic absorbing crystals with c axis along the nanocolumns axis, b axis parallel to the film interface, and 74.8° monoclinic angle between a and c axes. The columnar thin film reveals anomalous optical dispersion, extreme birefringence, and strong dichroism and differs entirely from bulk chromium.

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Generalized ellipsometry for monoclinic absorbing materials: determination of optical constants of Cr columnar thin films

Abstract

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