Generalized ellipsometry for monoclinic absorbing materials: determination of optical constants of Cr columnar thin films

D. Schmidt, B. Booso, T. Hofmann, E. Schubert, A. Sarangan, M. Schubert

Research output: Contribution to journalArticle

57 Scopus citations

Abstract

Generalized spectroscopic ellipsometry is used to determine the form-induced birefringence and monoclinic optical constants of chromium columnar thin films. The slanted nanocolumns were deposited by glancing angle deposition under 85° incidence and are tilted from the surface normal. Dichroism measured for wavelengths from 400 to 1000 nm renders the Cr nanocolumns monoclinic absorbing crystals with c axis along the nanocolumns axis, b axis parallel to the film interface, and 74.8° monoclinic angle between a and c axes. The columnar thin film reveals anomalous optical dispersion, extreme birefringence, and strong dichroism and differs entirely from bulk chromium.

Original languageEnglish (US)
Pages (from-to)992-994
Number of pages3
JournalOptics Letters
Volume34
Issue number7
DOIs
StatePublished - Apr 1 2009

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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