Abstract
In this paper, we will describe a new method to fabricate optical diffractive gratings on glass surface with direct CW CO2 laser irradiation. A laser beam with linear polarization was focused and scanned on a glass substrate. The interaction of the beam with the material irradiated results in a periodic ridge structure formation on the substrate under a well-controlled laser irradiation dose. Using multi-path scanning method, with a suitable overlap, diffractive grating with large area can be achieved. In this experiment, laser irradiation dose was 50 J/cm2, laser scanning speed was 0.2 mm/s, the diameter of focused beam was 30 μm, and the grating period was about 8 μm.
Original language | English (US) |
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Pages (from-to) | 266-271 |
Number of pages | 6 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 4915 |
DOIs | |
State | Published - 2002 |
Externally published | Yes |
Event | Lasers in Materials Processing and Manufacturing - Shanghai, China Duration: Oct 16 2002 → Oct 18 2002 |
Keywords
- CW CO laser
- Glass substrate
- Grating
- Linear polarization
- Multi-path scanning
- Periodic structure
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering