Grating fabrication with CW CO2 laser irradiation

D. J. Wu, C. W. An, M. H. Hong, W. J. Wang, Y. Z. Peng, Y. F. Lu

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations


In this paper, we will describe a new method to fabricate optical diffractive gratings on glass surface with direct CW CO2 laser irradiation. A laser beam with linear polarization was focused and scanned on a glass substrate. The interaction of the beam with the material irradiated results in a periodic ridge structure formation on the substrate under a well-controlled laser irradiation dose. Using multi-path scanning method, with a suitable overlap, diffractive grating with large area can be achieved. In this experiment, laser irradiation dose was 50 J/cm2, laser scanning speed was 0.2 mm/s, the diameter of focused beam was 30 μm, and the grating period was about 8 μm.

Original languageEnglish (US)
Pages (from-to)266-271
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2002
Externally publishedYes
EventLasers in Materials Processing and Manufacturing - Shanghai, China
Duration: Oct 16 2002Oct 18 2002


  • CW CO laser
  • Glass substrate
  • Grating
  • Linear polarization
  • Multi-path scanning
  • Periodic structure

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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