Growth of diamond by rf plasma assisted chemical vapor deposition

Duane E. Meyer; Natale J. Ianno; John A. Woollam; B. Swartzlander; A. J. Nelson

doi:10.1117/12.948142

Growth of diamond by rf plasma assisted chemical vapor deposition

Duane E. Meyer, Natale J. Ianno, John A. Woollam, B. Swartzlander, A. J. Nelson

Electrical & Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Diamond particles have been produced by inductively coupled radio frequency plasma assisted chemical vapor deposition. Analysis indicates that particles having a thin graphitic surface, as well as diamond particles with no surface coatings have been deposited. Scanning electron microscopy analysis shows that particles are deposited on a pedestal which Auger spectroscopy indicates to be graphitic. This phenomenon has not been previously reported in the literature.

Original language	English (US)
Pages (from-to)	66-69
Number of pages	4
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	969
DOIs	https://doi.org/10.1117/12.948142
State	Published - Jan 17 1989

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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title = "Growth of diamond by rf plasma assisted chemical vapor deposition",

abstract = "Diamond particles have been produced by inductively coupled radio frequency plasma assisted chemical vapor deposition. Analysis indicates that particles having a thin graphitic surface, as well as diamond particles with no surface coatings have been deposited. Scanning electron microscopy analysis shows that particles are deposited on a pedestal which Auger spectroscopy indicates to be graphitic. This phenomenon has not been previously reported in the literature.",

author = "Meyer, {Duane E.} and Ianno, {Natale J.} and Woollam, {John A.} and B. Swartzlander and Nelson, {A. J.}",

year = "1989",

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doi = "10.1117/12.948142",

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AU - Meyer, Duane E.

AU - Ianno, Natale J.

AU - Woollam, John A.

AU - Swartzlander, B.

AU - Nelson, A. J.

PY - 1989/1/17

Y1 - 1989/1/17

N2 - Diamond particles have been produced by inductively coupled radio frequency plasma assisted chemical vapor deposition. Analysis indicates that particles having a thin graphitic surface, as well as diamond particles with no surface coatings have been deposited. Scanning electron microscopy analysis shows that particles are deposited on a pedestal which Auger spectroscopy indicates to be graphitic. This phenomenon has not been previously reported in the literature.

AB - Diamond particles have been produced by inductively coupled radio frequency plasma assisted chemical vapor deposition. Analysis indicates that particles having a thin graphitic surface, as well as diamond particles with no surface coatings have been deposited. Scanning electron microscopy analysis shows that particles are deposited on a pedestal which Auger spectroscopy indicates to be graphitic. This phenomenon has not been previously reported in the literature.

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JF - Proceedings of SPIE - The International Society for Optical Engineering

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Growth of diamond by rf plasma assisted chemical vapor deposition

Abstract

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