TY - GEN
T1 - High precision positioning control for SPM based nanomanipulation
T2 - 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014
AU - Song, Bo
AU - Sun, Zhiyong
AU - Xi, Ning
AU - Yang, Ruiguo
AU - Chen, Liangliang
PY - 2014
Y1 - 2014
N2 - Scanning probe microscope (SPM) based nanomanipulations have been successfully applied to various fields to explore and study the unique structures and properties in the nano world. SPM has the ability to manipulate nanoparticles and modify a sample surface in nano scale. Therefore, the positioning accuracy of the SPM probe is the crucial for nanomanipulations. In general, the precision of SPM based nanomanipulations has been limited mainly by hysteresis, creep and drift of the piezo actuator. In this research, a new control strategy named hysteresis creep inverse based robust adaptive model reference control (RAMRC) is proposed to reduce the hysteresis, creep and system drift of the SPM scanner for improving the positioning accuracy of nanomanipulations. The RAMRC approach uses a compensator to compensate the hysteresis and creep. In addition, to tackle the unknown drift, the RAMRC also has a robust adaptive controller to explicitly deals with the noise and disturbance. This is suitable for manipulating nano-objects in a noisy environment, which is difficult for fixed operators/parameters based compensators and controllers. Additionally, the numerical experimental results support the RAMRC theory well and the position error can be controlled within approximate ten nanometers based on simulation results.
AB - Scanning probe microscope (SPM) based nanomanipulations have been successfully applied to various fields to explore and study the unique structures and properties in the nano world. SPM has the ability to manipulate nanoparticles and modify a sample surface in nano scale. Therefore, the positioning accuracy of the SPM probe is the crucial for nanomanipulations. In general, the precision of SPM based nanomanipulations has been limited mainly by hysteresis, creep and drift of the piezo actuator. In this research, a new control strategy named hysteresis creep inverse based robust adaptive model reference control (RAMRC) is proposed to reduce the hysteresis, creep and system drift of the SPM scanner for improving the positioning accuracy of nanomanipulations. The RAMRC approach uses a compensator to compensate the hysteresis and creep. In addition, to tackle the unknown drift, the RAMRC also has a robust adaptive controller to explicitly deals with the noise and disturbance. This is suitable for manipulating nano-objects in a noisy environment, which is difficult for fixed operators/parameters based compensators and controllers. Additionally, the numerical experimental results support the RAMRC theory well and the position error can be controlled within approximate ten nanometers based on simulation results.
UR - http://www.scopus.com/inward/record.url?scp=84906692371&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84906692371&partnerID=8YFLogxK
U2 - 10.1109/AIM.2014.6878322
DO - 10.1109/AIM.2014.6878322
M3 - Conference contribution
AN - SCOPUS:84906692371
SN - 9781479957361
T3 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
SP - 1658
EP - 1663
BT - AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics
PB - Institute of Electrical and Electronics Engineers Inc.
Y2 - 8 July 2014 through 11 July 2014
ER -