High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control using femtosecond pulse trains

Lan Jiang, Pengjun Liu, Xueliang Yan, Ni Leng, Chuancai Xu, Hai Xiao, Yongfeng Lu

Research output: Contribution to journalArticlepeer-review

54 Scopus citations

Abstract

This study proposes a rear-surface ablation enhancement approach to fabricate high-aspect-ratio microchannels by temporally shaping femtosecond laser pulse trains. In the case study of K9 glass, enhancements of up to a 56 times higher material removal rate and a three times greater maximum drilling depth are obtained by the proposed method, as compared with conventional femtosecond laser drilling at the same processing parameters. The improvements are due to the changes of photon-electron interactions by shaping femtosecond pulse train, which can effectively adjust the photon absorption and localized transient material properties by changing electron dynamics such as free electron densities.

Original languageEnglish (US)
Pages (from-to)2781-2783
Number of pages3
JournalOptics Letters
Volume37
Issue number14
DOIs
StatePublished - Jul 15 2012

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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