Hybrid laser processing for microfabrication of glass

K. Sugioka, K. Obata, M. H. Hong, D. J. Wu, L. L. Wong, Y. F. Lu, T. C. Chong, K. Midorikawa

Research output: Contribution to journalArticlepeer-review

29 Scopus citations

Abstract

Hybrid laser processing for the precision microfabrication of glass materials in which the interaction of a conventional pulsed laser beam and a medium on the material surface leads to effective ablation and modification, is reviewed. A major role of the medium is to produce strong absorption of the conventional laser beam by the material. Simultaneous irradiation by a vacuum ultraviolet (VUV) laser beam that possesses an extremely small laser fluence and an ultraviolet (UV) laser greatly improves the ablation quality and modification efficiency for fused silica (VUV-UV multiwavelength excitation process). The metal plasma generated by the laser beam effectively assists high-quality ablation of transparent materials by the same laser beam, resulting in microstructuring, cutting, color marking, printing, and selective metallization of glass materials (laser-induced plasma-assisted ablation (LIPAA)). The detailed discussion presented here includes the ablation mechanism of hybrid laser processing.

Original languageEnglish (US)
Pages (from-to)251-257
Number of pages7
JournalApplied Physics A: Materials Science and Processing
Volume77
Issue number2
DOIs
StatePublished - Jul 2003
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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