Hydrogen analysis as a function of depth for hydrogenous films and polymers by proton recoil detection

D. C. Ingram; A. W. McCormick; P. P. Pronko; J. D. Carlson; J. A. Woollam

doi:10.1016/0168-583X(85)90669-X

Hydrogen analysis as a function of depth for hydrogenous films and polymers by proton recoil detection

D. C. Ingram, A. W. McCormick, P. P. Pronko, J. D. Carlson, J. A. Woollam

Electrical & Computer Engineering

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36 Scopus citations

Abstract

A quantitative analysis of the hydrogen content of a material, as a function of depth, may be achieved by energy analysis of protons recoiled from a sample of the material subject to MeV helium ion bombardment. The work presented includes an experimental determination of the cross-section for recoil production which is compared to theoretical predictions. Data is presented from the analysis of hydrogenous films and polymers. For the latter, the analysis has been performed on MeV heavy ion implanted material as well as pristine samples. The particular advantages of this technique are that it is compatible with and complementary to Rutherford backscattering (RBS) analysis for heavy element analysis, and it is less destructive and has a higher cross section than other nuclear reaction techniques.

Original language	English (US)
Pages (from-to)	430-434
Number of pages	5
Journal	Nuclear Inst. and Methods in Physics Research, B
Volume	6
Issue number	1-2
DOIs	https://doi.org/10.1016/0168-583X(85)90669-X
State	Published - Jan 1985

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

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title = "Hydrogen analysis as a function of depth for hydrogenous films and polymers by proton recoil detection",

abstract = "A quantitative analysis of the hydrogen content of a material, as a function of depth, may be achieved by energy analysis of protons recoiled from a sample of the material subject to MeV helium ion bombardment. The work presented includes an experimental determination of the cross-section for recoil production which is compared to theoretical predictions. Data is presented from the analysis of hydrogenous films and polymers. For the latter, the analysis has been performed on MeV heavy ion implanted material as well as pristine samples. The particular advantages of this technique are that it is compatible with and complementary to Rutherford backscattering (RBS) analysis for heavy element analysis, and it is less destructive and has a higher cross section than other nuclear reaction techniques.",

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T1 - Hydrogen analysis as a function of depth for hydrogenous films and polymers by proton recoil detection

AU - Ingram, D. C.

AU - McCormick, A. W.

AU - Pronko, P. P.

AU - Carlson, J. D.

AU - Woollam, J. A.

PY - 1985/1

Y1 - 1985/1

N2 - A quantitative analysis of the hydrogen content of a material, as a function of depth, may be achieved by energy analysis of protons recoiled from a sample of the material subject to MeV helium ion bombardment. The work presented includes an experimental determination of the cross-section for recoil production which is compared to theoretical predictions. Data is presented from the analysis of hydrogenous films and polymers. For the latter, the analysis has been performed on MeV heavy ion implanted material as well as pristine samples. The particular advantages of this technique are that it is compatible with and complementary to Rutherford backscattering (RBS) analysis for heavy element analysis, and it is less destructive and has a higher cross section than other nuclear reaction techniques.

AB - A quantitative analysis of the hydrogen content of a material, as a function of depth, may be achieved by energy analysis of protons recoiled from a sample of the material subject to MeV helium ion bombardment. The work presented includes an experimental determination of the cross-section for recoil production which is compared to theoretical predictions. Data is presented from the analysis of hydrogenous films and polymers. For the latter, the analysis has been performed on MeV heavy ion implanted material as well as pristine samples. The particular advantages of this technique are that it is compatible with and complementary to Rutherford backscattering (RBS) analysis for heavy element analysis, and it is less destructive and has a higher cross section than other nuclear reaction techniques.

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Hydrogen analysis as a function of depth for hydrogenous films and polymers by proton recoil detection

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