TY - JOUR
T1 - Imaging of flexural and torsional resonance modes of atomic force microscopy cantilevers using optical interferometry
AU - Reinstaedtler, Michael
AU - Rabe, Ute
AU - Scherer, Volker
AU - Turner, Joseph A.
AU - Arnold, Walter
N1 - Funding Information:
This work was supported by the German Science Foundation through various grants. One of us (M.R.) is supported by a stipend via the Graduate College on “Advanced Materials for Efficient Energy Conversion”. The support of the U.S. Air Force Office of Scientific Research (grant no. F49620-99-1-0254) for J.A.T. is gratefully acknowledged. We also thank U. Hartmann, Department of Experimental Physics, University of the Saarland, for discussions.
PY - 2003/6/10
Y1 - 2003/6/10
N2 - Commercial rectangular atomic force microscope cantilever beams made of silicon were set into vibration, using a piezoelectric ultrasonic transducer coupled to the chip of a cantilever. The transducer was excited with continuous rf in the frequency range of 100 kHz to 3 MHz. The vibrations were monitored using an optical Michelson heterodyne-interferometer allowing the surface of the cantilever under examination to be scanned with a lateral resolution of several μm. A number of free torsional and flexural vibration modes of the beams were imaged quantitatively. Comparison of the experimental resonance frequencies and the amplitude and phase distribution of the modes to theoretical models showed that asymmetries in the beam strongly influence the vibrational behavior of the beam. The consequences for quantitative local stiffness measurements are discussed.
AB - Commercial rectangular atomic force microscope cantilever beams made of silicon were set into vibration, using a piezoelectric ultrasonic transducer coupled to the chip of a cantilever. The transducer was excited with continuous rf in the frequency range of 100 kHz to 3 MHz. The vibrations were monitored using an optical Michelson heterodyne-interferometer allowing the surface of the cantilever under examination to be scanned with a lateral resolution of several μm. A number of free torsional and flexural vibration modes of the beams were imaged quantitatively. Comparison of the experimental resonance frequencies and the amplitude and phase distribution of the modes to theoretical models showed that asymmetries in the beam strongly influence the vibrational behavior of the beam. The consequences for quantitative local stiffness measurements are discussed.
KW - Acoustic waves
KW - Atomic force microscopy
KW - Models of non-linear phenomena
UR - http://www.scopus.com/inward/record.url?scp=0038521680&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0038521680&partnerID=8YFLogxK
U2 - 10.1016/S0039-6028(03)00183-3
DO - 10.1016/S0039-6028(03)00183-3
M3 - Conference article
AN - SCOPUS:0038521680
SN - 0039-6028
VL - 532-535
SP - 1152
EP - 1158
JO - Surface Science
JF - Surface Science
T2 - Proceedings of the 7th International Conference on Nanometer
Y2 - 29 August 2002 through 31 August 2002
ER -