Imaging of flexural and torsional resonance modes of atomic force microscopy cantilevers using optical interferometry

Michael Reinstaedtler, Ute Rabe, Volker Scherer, Joseph A. Turner, Walter Arnold

Research output: Contribution to journalConference article

40 Scopus citations

Abstract

Commercial rectangular atomic force microscope cantilever beams made of silicon were set into vibration, using a piezoelectric ultrasonic transducer coupled to the chip of a cantilever. The transducer was excited with continuous rf in the frequency range of 100 kHz to 3 MHz. The vibrations were monitored using an optical Michelson heterodyne-interferometer allowing the surface of the cantilever under examination to be scanned with a lateral resolution of several μm. A number of free torsional and flexural vibration modes of the beams were imaged quantitatively. Comparison of the experimental resonance frequencies and the amplitude and phase distribution of the modes to theoretical models showed that asymmetries in the beam strongly influence the vibrational behavior of the beam. The consequences for quantitative local stiffness measurements are discussed.

Original languageEnglish (US)
Pages (from-to)1152-1158
Number of pages7
JournalSurface Science
Volume532-535
DOIs
StatePublished - Jun 10 2003
EventProceedings of the 7th International Conference on Nanometer - Malmo, Sweden
Duration: Aug 29 2002Aug 31 2002

Keywords

  • Acoustic waves
  • Atomic force microscopy
  • Models of non-linear phenomena

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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