@inproceedings{8211f75ae31045a2aa104af5c2ba8ea7,
title = "In-situ Ellipsometry and in-situ Raman thin film growth monitoring",
abstract = "Fast and reliable optical in-situ process diagnostics by spectroscopic ellipsometry and Raman scattering spectroscopy is demonstrated. Applications include design and control of dielectric multilayer mirros for soft-x-ray applications and solar cell absorber layers deposited within a roll-toroll system.",
author = "Mathias Schubert and Carsten Bundesmann and Nurdin Ashkenov and Eva Schubert and Horst Neumann and Gerd Lippold",
note = "Funding Information: We acknowledge Daniel Spemann (Universit{\"a}t Leipzig) for RBS measurements and Gerald Wagner (Universit{\"a}t Leipzig) for the TEM characterization. Publisher Copyright: {\textcopyright} 2004 OSA - The Optical Society. All rights reserved.; Optical Interference Coatings, OIC 2004 ; Conference date: 27-06-2004 Through 02-07-2004",
year = "2004",
language = "English (US)",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
booktitle = "Optical Interference Coatings, OIC 2004",
}