In Situ Ellipsometry in Microelectronics

E. A. Irene, J. A. Woollam

Research output: Contribution to journal › Article › peer-review

ASJC Scopus subject areas

@article{36f89a7a59aa4ac9a96ce53bb1db4a33,

title = "In Situ Ellipsometry in Microelectronics",

author = "Irene, {E. A.} and Woollam, {J. A.}",

year = "1995",

month = may,

doi = "10.1557/S0883769400044857",

language = "English (US)",

volume = "20",

pages = "24--28",

journal = "MRS Bulletin",

issn = "0883-7694",

publisher = "Springer International Publishing AG",

number = "5",

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AU - Woollam, J. A.

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