In Situ Ellipsometry in Microelectronics

E. A. Irene, J. A. Woollam

Research output: Contribution to journalArticlepeer-review

19 Scopus citations
Original languageEnglish (US)
Pages (from-to)24-28
Number of pages5
JournalMRS Bulletin
Volume20
Issue number5
DOIs
StatePublished - May 1995

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

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