INFLUENCE OF IMPLANTATION CONDITIONS AND TARGET ORIENTATION IN HIGH DOSE IMPLANTATION OF Al** plus INTO Si.

F. Namavar, J. I. Budnick, A. Fasihuddin, H. C. Hayden, D. A. Pease, F. A. Otter, V. Patarini

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations
Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
PublisherNorth-Holland
Pages347-352
Number of pages6
ISBN (Print)0444008691
StatePublished - Jan 1 1984
Externally publishedYes

Publication series

NameMaterials Research Society Symposia Proceedings
Volume27
ISSN (Print)0272-9172

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Namavar, F., Budnick, J. I., Fasihuddin, A., Hayden, H. C., Pease, D. A., Otter, F. A., & Patarini, V. (1984). INFLUENCE OF IMPLANTATION CONDITIONS AND TARGET ORIENTATION IN HIGH DOSE IMPLANTATION OF Al** plus INTO Si. In Materials Research Society Symposia Proceedings (pp. 347-352). (Materials Research Society Symposia Proceedings; Vol. 27). North-Holland.