@inproceedings{7c8c3723a61d433e96b7b1aabc9fc53d,
title = "INFLUENCE OF IMPLANTATION CONDITIONS AND TARGET ORIENTATION IN HIGH DOSE IMPLANTATION OF Al** plus INTO Si.",
author = "F. Namavar and Budnick, {J. I.} and A. Fasihuddin and Hayden, {H. C.} and Pease, {D. A.} and Otter, {F. A.} and V. Patarini",
year = "1984",
language = "English (US)",
isbn = "0444008691",
series = "Materials Research Society Symposia Proceedings",
publisher = "North-Holland",
pages = "347--352",
booktitle = "Materials Research Society Symposia Proceedings",
}