INFLUENCE OF IMPLANTATION CONDITIONS AND TARGET ORIENTATION IN HIGH DOSE IMPLANTATION OF Al** plus INTO Si.

F. Namavar, J. I. Budnick, A. Fasihuddin, H. C. Hayden, D. A. Pease, F. A. Otter, V. Patarini

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

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