@inproceedings{0b08295b370c43c58546ef9f0b5eb133,
title = "Infrared ellipsometric characterization of silicon nitride films on textured Si photovoltaic cells",
abstract = "We present an infrared spectroscopic ellipsometry investigation of Si xNy films deposited on textured Si substrates employed for photovoltaic cells. A multiple-sample data analysis scheme is used in order to determine the SixNy dielectric function and thickness parameters regardless of the surface morphology of the substrate. We observe changes in the dielectric function of the silicon nitride film which suggest variations in the chemical composition of the films depending on the substrate morphology.",
author = "Saenger, {M. F.} and M. Sch{\"a}del and T. Hofmann and J. Hilfiker and J. Sun and T. Tiwald and M. Schubert and Woollam, {J. A.}",
year = "2009",
language = "English (US)",
isbn = "9781605110950",
series = "Materials Research Society Symposium Proceedings",
pages = "145--150",
booktitle = "Materials Research Society Symposium Proceedings - Photovoltaic Materials and Manufacturing Issues",
note = "2008 MRS Fall Meeting ; Conference date: 01-12-2008 Through 04-12-2008",
}