Infrared ellipsometry characterization of porous silicon Bragg reflectors

Shahin Zangooie, Shahin Zangooie, Mathias Schubert, Chris Trimble, Daniel W. Thompson, John A. Woollam

Research output: Contribution to journalArticle

22 Scopus citations

Abstract

We investigate porous silicon Bragg reflectors in a nondestructive manner using variable angle-ofincidence infrared spectroscopic ellipsometry. In addition to the thickness, volume porosity, inhomogeneity, and optical anisotropy, properties of the solid content of the porous material are investigated in terms of dielectric function and surface chemistry. The material was found to have positive birefringence. The high sensitivity of the technique is employed to detect and identify infrared resonant absorptions related to different SiH as well as Si-O-Si vibrational modes. The average electrical resistivity of the solid content of the porous material is determined to be 0.03 Ω cm, which is larger than the corresponding bulk value of 0.019 Ω cm. Furthermore the average carrier concentration in the porous material shows a decrease from 6.2 × 1018 cm3 to 4 × 1018 cm3.

Original languageEnglish (US)
Pages (from-to)906-912
Number of pages7
JournalApplied optics
Volume40
Issue number6
DOIs
StatePublished - Feb 20 2001

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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