Infrared ellipsometry on hexagonal and cubic boron nitride thin films

E. Franke, H. Neumann, M. Schubert, T. E. Tiwald, J. A. Woollam, J. Hahn

Research output: Contribution to journalArticle

14 Scopus citations

Abstract

Infrared spectroscopic ellipsometry (IRSE) over the wavelength range from 700 to 3000 cm-1 has been used to study and distinguish the microstructure of polycrystalline hexagonal and cubic boron nitride thin films deposited by magnetron sputtering onto (100) silicon. The IRSE data are sensitive to the thin-film layer structure, phase composition, and average grain c-axes orientations of the hexagonal phase. We determine the amount of cubic material in high cubic boron nitride content thin films from the infrared optical dielectric function using an effective medium approach.

Original languageEnglish (US)
Pages (from-to)1668-1670
Number of pages3
JournalApplied Physics Letters
Volume70
Issue number13
DOIs
StatePublished - Mar 31 1997

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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