Instrumentation: Ellipsometry

J. N. Hilfiker, J. A. Woollam

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish (US)
Title of host publicationEncyclopedia of Modern Optics, Five-Volume Set
PublisherElsevier Inc.
Pages297-307
Number of pages11
ISBN (Print)9780123693952
DOIs
StatePublished - Jan 1 2004

ASJC Scopus subject areas

  • Computer Science(all)

Cite this

Hilfiker, J. N., & Woollam, J. A. (2004). Instrumentation: Ellipsometry. In Encyclopedia of Modern Optics, Five-Volume Set (pp. 297-307). Elsevier Inc.. https://doi.org/10.1016/B0-12-369395-0/00833-2