Instrumentation: Ellipsometry

J. N. Hilfiker, J. A. Woollam

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish (US)
Title of host publicationEncyclopedia of Modern Optics, Five-Volume Set
PublisherElsevier Inc.
Pages297-307
Number of pages11
ISBN (Print)9780123693952
DOIs
StatePublished - Jan 1 2004

ASJC Scopus subject areas

  • Computer Science(all)

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