@inproceedings{571ac04aceef4f52874b38d4c9ddbd72,
title = "Interactions between pulsed laser-induced plasma and ECR microwave plasma",
abstract = "Pulsed-laser deposition (PLD) is a versatile technique for thin film deposition. The generation and propagation of laserinduced plasmas have been extensively studied. Other plasma sources have been combined with PLD to improve the film qualities. The knowledge about the interactions between the laser-induced plasmas and additional plasmas and their effects on film growth is still limited. We have investigated the optical emission spectra from the interaction region of low-pressure ECR microwave plasmas and pulsed-laser-induced plasmas. In this region, the spatial and temporal distributions of the laser-ablated species were altered while very few collisions were expected in the ambient gas due to the low pressure. The results were compared with those with laser ablation or ECR microwave discharge along. The mechanisms and effects of the interactions were discussed.",
keywords = "ECR microwave plasma, Optical emission spectroscopy, Pulsed laser ablation",
author = "Junyi Tang and Jian Sun and Hao Wang and Jie Shao and Hao Ling and Xiaokang Shen and Jiada Wu and Yongfeng Lu",
year = "2008",
doi = "10.1117/12.762277",
language = "English (US)",
isbn = "9780819470553",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Laser-based Micro- and Nanopackaging and Assembly II",
note = "Laser-based Micro- and Nanopackaging and Assembly II ; Conference date: 22-01-2008 Through 24-01-2008",
}