Interfacial Electrical Properties of Ion-Beam Sputter Deposited Amorphous Carbon on Silicon

Keyphrases

• Ion Beam 100%
• Electrical Properties 100%
• Sputter-deposited 100%
• Amorphous Carbon 100%
• Si Substrate 50%
• Carbon Film 50%
• Diamond-like 50%
• Electronic Density of States 50%
• Interfacial Properties 50%
• Ion Beam Sputtering 50%
• Conductance Measurement 50%
• Capacitance Measurement 50%
• Interface State Density 50%

Engineering

• Si Substrate 100%
• Diamond-Like Carbon 100%
• Amorphous Carbon 100%
• Electronic State 100%
• Constant Time 100%
• Interface State 100%

Material Science

• Silicon 100%
• Density 100%
• Amorphous Carbon 100%
• Amorphous Material 50%
• Diamond Like Carbon Films 50%
• Interface Property 50%
• Capacitance 50%