Investigation of femtosecond laser-assisted micromachining of lithium niobate

A. Malshe; D. Deshpande; E. Stach; K. Rajurkar; D. Alexander

doi:10.1016/S0007-8506(07)60675-1

Investigation of femtosecond laser-assisted micromachining of lithium niobate

A. Malshe, D. Deshpande, E. Stach, K. Rajurkar, D. Alexander

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

Lithium Niobate has a potential for applications in electronics and communication industries due to its unique electro-optical, piezoelectric and nonlinear properties. Femtosecond laser machining offers the best alternative to machine the mechanically fragile and optically delicate lithium niobate crystal. This paper reports a study of the effect of femtosecond laser machining on the surface integrity of lithium niobate. The transmission electron microscopy reveals a 100nm thin amorphous region and a void. The chemical analysis shows a loss of lithium and oxygen from the surface and sub-surface. Optical illumination facilitates the selective readout of the written spots of 2 microns size.

Original language	English (US)
Pages (from-to)	187-190
Number of pages	4
Journal	CIRP Annals - Manufacturing Technology
Volume	53
Issue number	1
DOIs	https://doi.org/10.1016/S0007-8506(07)60675-1
State	Published - 2004

Keywords

Laser micro machining
Single crystal
Surface

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1016/S0007-8506(07)60675-1

Cite this

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title = "Investigation of femtosecond laser-assisted micromachining of lithium niobate",

abstract = "Lithium Niobate has a potential for applications in electronics and communication industries due to its unique electro-optical, piezoelectric and nonlinear properties. Femtosecond laser machining offers the best alternative to machine the mechanically fragile and optically delicate lithium niobate crystal. This paper reports a study of the effect of femtosecond laser machining on the surface integrity of lithium niobate. The transmission electron microscopy reveals a 100nm thin amorphous region and a void. The chemical analysis shows a loss of lithium and oxygen from the surface and sub-surface. Optical illumination facilitates the selective readout of the written spots of 2 microns size.",

keywords = "Laser micro machining, Single crystal, Surface",

author = "A. Malshe and D. Deshpande and E. Stach and K. Rajurkar and D. Alexander",

note = "Funding Information: The authors acknowledge the help of Dr. Eric Stach of the Lawrence Berkeley laboratories for the TEM sample preparation. The authors are thankful to Dr. 2. Yu for his assistance in the preparation of the manuscript. This work is supported by the National Science Foundation (NSF) EPSCoR grant # 9977830.",

year = "2004",

doi = "10.1016/S0007-8506(07)60675-1",

language = "English (US)",

volume = "53",

pages = "187--190",

journal = "CIRP Annals - Manufacturing Technology",

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T1 - Investigation of femtosecond laser-assisted micromachining of lithium niobate

AU - Malshe, A.

AU - Deshpande, D.

AU - Stach, E.

AU - Rajurkar, K.

AU - Alexander, D.

N1 - Funding Information: The authors acknowledge the help of Dr. Eric Stach of the Lawrence Berkeley laboratories for the TEM sample preparation. The authors are thankful to Dr. 2. Yu for his assistance in the preparation of the manuscript. This work is supported by the National Science Foundation (NSF) EPSCoR grant # 9977830.

PY - 2004

Y1 - 2004

N2 - Lithium Niobate has a potential for applications in electronics and communication industries due to its unique electro-optical, piezoelectric and nonlinear properties. Femtosecond laser machining offers the best alternative to machine the mechanically fragile and optically delicate lithium niobate crystal. This paper reports a study of the effect of femtosecond laser machining on the surface integrity of lithium niobate. The transmission electron microscopy reveals a 100nm thin amorphous region and a void. The chemical analysis shows a loss of lithium and oxygen from the surface and sub-surface. Optical illumination facilitates the selective readout of the written spots of 2 microns size.

AB - Lithium Niobate has a potential for applications in electronics and communication industries due to its unique electro-optical, piezoelectric and nonlinear properties. Femtosecond laser machining offers the best alternative to machine the mechanically fragile and optically delicate lithium niobate crystal. This paper reports a study of the effect of femtosecond laser machining on the surface integrity of lithium niobate. The transmission electron microscopy reveals a 100nm thin amorphous region and a void. The chemical analysis shows a loss of lithium and oxygen from the surface and sub-surface. Optical illumination facilitates the selective readout of the written spots of 2 microns size.

KW - Laser micro machining

KW - Single crystal

KW - Surface

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JF - CIRP Annals - Manufacturing Technology

SN - 0007-8506

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Investigation of femtosecond laser-assisted micromachining of lithium niobate

Abstract

Keywords

ASJC Scopus subject areas

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