Abstract
Lithium Niobate has a potential for applications in electronics and communication industries due to its unique electro-optical, piezoelectric and nonlinear properties. Femtosecond laser machining offers the best alternative to machine the mechanically fragile and optically delicate lithium niobate crystal. This paper reports a study of the effect of femtosecond laser machining on the surface integrity of lithium niobate. The transmission electron microscopy reveals a 100nm thin amorphous region and a void. The chemical analysis shows a loss of lithium and oxygen from the surface and sub-surface. Optical illumination facilitates the selective readout of the written spots of 2 microns size.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 187-190 |
| Number of pages | 4 |
| Journal | CIRP Annals - Manufacturing Technology |
| Volume | 53 |
| Issue number | 1 |
| DOIs | |
| State | Published - 2004 |
Keywords
- Laser micro machining
- Single crystal
- Surface
ASJC Scopus subject areas
- Mechanical Engineering
- Industrial and Manufacturing Engineering
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Malshe, A., Deshpande, D., Stach, E., Rajurkar, K., & Alexander, D. (2004). Investigation of femtosecond laser-assisted micromachining of lithium niobate. CIRP Annals - Manufacturing Technology, 53(1), 187-190. https://doi.org/10.1016/S0007-8506(07)60675-1