Ion beam smoothing of metallic mirrors

David C. Ingram; Antony W. McCormick; Peter P. Pronko; John A. Woollam; Paul G. Snyder; David B. Poker

doi:10.1016/0025-5416(87)90239-4

Ion beam smoothing of metallic mirrors

David C. Ingram, Antony W. McCormick, Peter P. Pronko, John A. Woollam, Paul G. Snyder, David B. Poker

Electrical & Computer Engineering

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

The implantation of 150 keV molybdenum ions into molybdenum mirrors and 400 keV silver or copper ions into copper mirrors is found to increase the reflectivity of these mirrors. Analysis of ellipsometric data from these samples using the Bruggeman effective medium approximation demonstrates that the change is due to smoothing of the surface. The improvement reaches a maximum as a function of fluence and then declines as the surface is roughened through sputter-induced topography. The smoothing effect appears to be dependent on elastic energy deposition in the vicinity of the surface. However, if the energy density at the surface is too high, such as with 1 MeV gold ions, then spike effects appears to roughen the surface before significant smoothing can take place. Rotating the samples in the ion beam does not affect the initial smoothing, or its decline, but delays the development of the visible roughening.

Original language	English (US)
Pages (from-to)	417-421
Number of pages	5
Journal	Materials Science and Engineering
Volume	90
Issue number	C
DOIs	https://doi.org/10.1016/0025-5416(87)90239-4
State	Published - Jun 1987

ASJC Scopus subject areas

General Engineering

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10.1016/0025-5416(87)90239-4

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title = "Ion beam smoothing of metallic mirrors",

abstract = "The implantation of 150 keV molybdenum ions into molybdenum mirrors and 400 keV silver or copper ions into copper mirrors is found to increase the reflectivity of these mirrors. Analysis of ellipsometric data from these samples using the Bruggeman effective medium approximation demonstrates that the change is due to smoothing of the surface. The improvement reaches a maximum as a function of fluence and then declines as the surface is roughened through sputter-induced topography. The smoothing effect appears to be dependent on elastic energy deposition in the vicinity of the surface. However, if the energy density at the surface is too high, such as with 1 MeV gold ions, then spike effects appears to roughen the surface before significant smoothing can take place. Rotating the samples in the ion beam does not affect the initial smoothing, or its decline, but delays the development of the visible roughening.",

author = "Ingram, {David C.} and McCormick, {Antony W.} and Pronko, {Peter P.} and Woollam, {John A.} and Snyder, {Paul G.} and Poker, {David B.}",

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TY - JOUR

T1 - Ion beam smoothing of metallic mirrors

AU - Ingram, David C.

AU - McCormick, Antony W.

AU - Pronko, Peter P.

AU - Woollam, John A.

AU - Snyder, Paul G.

AU - Poker, David B.

PY - 1987/6

Y1 - 1987/6

N2 - The implantation of 150 keV molybdenum ions into molybdenum mirrors and 400 keV silver or copper ions into copper mirrors is found to increase the reflectivity of these mirrors. Analysis of ellipsometric data from these samples using the Bruggeman effective medium approximation demonstrates that the change is due to smoothing of the surface. The improvement reaches a maximum as a function of fluence and then declines as the surface is roughened through sputter-induced topography. The smoothing effect appears to be dependent on elastic energy deposition in the vicinity of the surface. However, if the energy density at the surface is too high, such as with 1 MeV gold ions, then spike effects appears to roughen the surface before significant smoothing can take place. Rotating the samples in the ion beam does not affect the initial smoothing, or its decline, but delays the development of the visible roughening.

AB - The implantation of 150 keV molybdenum ions into molybdenum mirrors and 400 keV silver or copper ions into copper mirrors is found to increase the reflectivity of these mirrors. Analysis of ellipsometric data from these samples using the Bruggeman effective medium approximation demonstrates that the change is due to smoothing of the surface. The improvement reaches a maximum as a function of fluence and then declines as the surface is roughened through sputter-induced topography. The smoothing effect appears to be dependent on elastic energy deposition in the vicinity of the surface. However, if the energy density at the surface is too high, such as with 1 MeV gold ions, then spike effects appears to roughen the surface before significant smoothing can take place. Rotating the samples in the ion beam does not affect the initial smoothing, or its decline, but delays the development of the visible roughening.

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DO - 10.1016/0025-5416(87)90239-4

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VL - 90

SP - 417

EP - 421

JO - Materials Science and Engineering

JF - Materials Science and Engineering

IS - C

ER -

Ion beam smoothing of metallic mirrors

Abstract

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