IR ellipsometry studies of polymers and oxygen plasma-treated polymers

Corey L. Bungay; Thomas E. Tiwald; Daniel W. Thompson; Michael J. DeVries; John A. Woollam; James F. Elman

doi:10.1016/S0040-6090(97)00983-8

IR ellipsometry studies of polymers and oxygen plasma-treated polymers

Corey L. Bungay, Thomas E. Tiwald, Daniel W. Thompson, Michael J. DeVries, John A. Woollam, James F. Elman

Electrical & Computer Engineering

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

An infrared variable angle spectroscopic ellipsometer (IR-VASE) was used to study organic polymers in the infrared (2.5-14 μm wavelength) spectral region. For the analysis of thin film polymers IR spectroscopic ellipsometry has greater sensitivity over traditional FTIR spectroscopy providing an exciting way to characterize these materials optically. The IR-VASE used in this study is of high accuracy, rotating polarizer, rotating compensator ellipsometer that uses an FTIR spectrometer as a light source. The IR-VASE was used to measure the infrared optical constants of various polymers in both solid and liquid form. These optical constants were then used to model the percentage of water in a thin film of gelatin and the percentage of residual solvent in a thin film of silicone. In addition, the IR-VASE provided a sensitive measurement of silicone chemistry and chemical changes caused by exposure to an oxygen plasma.

Original language	English (US)
Pages (from-to)	713-717
Number of pages	5
Journal	Thin Solid Films
Volume	313-314
DOIs	https://doi.org/10.1016/S0040-6090(97)00983-8
State	Published - Feb 13 1998

Keywords

Attenuated total reflection
Infrared ellipsometry
Organic polymer
Oxygen plasma

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/S0040-6090(97)00983-8

Cite this

@article{8813eec4a23942c7aeef7de0a127ae4c,

title = "IR ellipsometry studies of polymers and oxygen plasma-treated polymers",

abstract = "An infrared variable angle spectroscopic ellipsometer (IR-VASE) was used to study organic polymers in the infrared (2.5-14 μm wavelength) spectral region. For the analysis of thin film polymers IR spectroscopic ellipsometry has greater sensitivity over traditional FTIR spectroscopy providing an exciting way to characterize these materials optically. The IR-VASE used in this study is of high accuracy, rotating polarizer, rotating compensator ellipsometer that uses an FTIR spectrometer as a light source. The IR-VASE was used to measure the infrared optical constants of various polymers in both solid and liquid form. These optical constants were then used to model the percentage of water in a thin film of gelatin and the percentage of residual solvent in a thin film of silicone. In addition, the IR-VASE provided a sensitive measurement of silicone chemistry and chemical changes caused by exposure to an oxygen plasma.",

keywords = "Attenuated total reflection, Infrared ellipsometry, Organic polymer, Oxygen plasma",

author = "Bungay, {Corey L.} and Tiwald, {Thomas E.} and Thompson, {Daniel W.} and DeVries, {Michael J.} and Woollam, {John A.} and Elman, {James F.}",

note = "Funding Information: Research supported by NASA Lewis Grant NAG3-1802.",

year = "1998",

month = feb,

day = "13",

doi = "10.1016/S0040-6090(97)00983-8",

language = "English (US)",

volume = "313-314",

pages = "713--717",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

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T1 - IR ellipsometry studies of polymers and oxygen plasma-treated polymers

AU - Bungay, Corey L.

AU - Tiwald, Thomas E.

AU - Thompson, Daniel W.

AU - DeVries, Michael J.

AU - Woollam, John A.

AU - Elman, James F.

N1 - Funding Information: Research supported by NASA Lewis Grant NAG3-1802.

PY - 1998/2/13

Y1 - 1998/2/13

N2 - An infrared variable angle spectroscopic ellipsometer (IR-VASE) was used to study organic polymers in the infrared (2.5-14 μm wavelength) spectral region. For the analysis of thin film polymers IR spectroscopic ellipsometry has greater sensitivity over traditional FTIR spectroscopy providing an exciting way to characterize these materials optically. The IR-VASE used in this study is of high accuracy, rotating polarizer, rotating compensator ellipsometer that uses an FTIR spectrometer as a light source. The IR-VASE was used to measure the infrared optical constants of various polymers in both solid and liquid form. These optical constants were then used to model the percentage of water in a thin film of gelatin and the percentage of residual solvent in a thin film of silicone. In addition, the IR-VASE provided a sensitive measurement of silicone chemistry and chemical changes caused by exposure to an oxygen plasma.

AB - An infrared variable angle spectroscopic ellipsometer (IR-VASE) was used to study organic polymers in the infrared (2.5-14 μm wavelength) spectral region. For the analysis of thin film polymers IR spectroscopic ellipsometry has greater sensitivity over traditional FTIR spectroscopy providing an exciting way to characterize these materials optically. The IR-VASE used in this study is of high accuracy, rotating polarizer, rotating compensator ellipsometer that uses an FTIR spectrometer as a light source. The IR-VASE was used to measure the infrared optical constants of various polymers in both solid and liquid form. These optical constants were then used to model the percentage of water in a thin film of gelatin and the percentage of residual solvent in a thin film of silicone. In addition, the IR-VASE provided a sensitive measurement of silicone chemistry and chemical changes caused by exposure to an oxygen plasma.

KW - Attenuated total reflection

KW - Infrared ellipsometry

KW - Organic polymer

KW - Oxygen plasma

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UR - http://www.scopus.com/inward/citedby.url?scp=0031998222&partnerID=8YFLogxK

U2 - 10.1016/S0040-6090(97)00983-8

DO - 10.1016/S0040-6090(97)00983-8

M3 - Article

AN - SCOPUS:0031998222

SN - 0040-6090

VL - 313-314

SP - 713

EP - 717

JO - Thin Solid Films

JF - Thin Solid Films

ER -

IR ellipsometry studies of polymers and oxygen plasma-treated polymers

Abstract

Keywords

ASJC Scopus subject areas

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