KrF excimer laser-assisted combustion-flame deposition of diamond films

Y. X. Han; H. Ling; Y. F. Lu

doi:10.1063/1.2402977

KrF excimer laser-assisted combustion-flame deposition of diamond films

Y. X. Han, H. Ling, Y. F. Lu

Electrical & Computer Engineering

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

Cobalt (Co) composition has detrimental effects on the deposition of diamond films on cemented tungsten carbide (WC-Co) substrates. It decreases adhesion of the deposited films to the substrates and causes a transformation of s p3 -bonded diamond to s p2 -bonded graphite. In this study, a KrF excimer laser with a wavelength of 248 nm, a pulse width of 23 ns, and a pulse energy range of 84-450 mJ was used in the combustion-flame method to improve the quality of the deposited diamond films. Scanning electron microscopy, energy dispersive x-ray analysis, and Raman spectroscopy of the deposited films showed that a laser irradiation during combustion-flame deposition of diamond decreased the cobalt composition drastically. Based on the experimental results, the influence of the laser irradiation on the deposition process was analyzed.

Original language	English (US)
Article number	124911
Journal	Journal of Applied Physics
Volume	100
Issue number	12
DOIs	https://doi.org/10.1063/1.2402977
State	Published - 2006

ASJC Scopus subject areas

General Physics and Astronomy

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10.1063/1.2402977

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@article{43fbff928e3a4e42923540c76c3662f2,

title = "KrF excimer laser-assisted combustion-flame deposition of diamond films",

abstract = "Cobalt (Co) composition has detrimental effects on the deposition of diamond films on cemented tungsten carbide (WC-Co) substrates. It decreases adhesion of the deposited films to the substrates and causes a transformation of s p3 -bonded diamond to s p2 -bonded graphite. In this study, a KrF excimer laser with a wavelength of 248 nm, a pulse width of 23 ns, and a pulse energy range of 84-450 mJ was used in the combustion-flame method to improve the quality of the deposited diamond films. Scanning electron microscopy, energy dispersive x-ray analysis, and Raman spectroscopy of the deposited films showed that a laser irradiation during combustion-flame deposition of diamond decreased the cobalt composition drastically. Based on the experimental results, the influence of the laser irradiation on the deposition process was analyzed.",

author = "Han, {Y. X.} and H. Ling and Lu, {Y. F.}",

note = "Funding Information: The authors would like to thank Dr. D. Doerr and Dr. D. Alexander of the Department of Electrical Engineering at the University of Nebraska-Lincoln (UNL) for providing convenient access to their SEM, Dr. N. Ianno for offering access of his stylus profilometer, Dr. Y. Zhou of the Beadle Center at UNL for help on SEM and EDX, and Dr. S. W. Martin and his students of the Department of Materials Science and Engineering at the Iowa State University for their help on the micro-Raman system. The homemade Raman system was built by K. J. Yi, who the authors would like to thank for great efforts. This work was financially supported by the U.S. Office of Naval Research (ONR) through the Multidisciplinary University Research Initiative (MURI) Program.",

year = "2006",

doi = "10.1063/1.2402977",

language = "English (US)",

volume = "100",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "12",

}

TY - JOUR

T1 - KrF excimer laser-assisted combustion-flame deposition of diamond films

AU - Han, Y. X.

AU - Ling, H.

AU - Lu, Y. F.

N1 - Funding Information: The authors would like to thank Dr. D. Doerr and Dr. D. Alexander of the Department of Electrical Engineering at the University of Nebraska-Lincoln (UNL) for providing convenient access to their SEM, Dr. N. Ianno for offering access of his stylus profilometer, Dr. Y. Zhou of the Beadle Center at UNL for help on SEM and EDX, and Dr. S. W. Martin and his students of the Department of Materials Science and Engineering at the Iowa State University for their help on the micro-Raman system. The homemade Raman system was built by K. J. Yi, who the authors would like to thank for great efforts. This work was financially supported by the U.S. Office of Naval Research (ONR) through the Multidisciplinary University Research Initiative (MURI) Program.

PY - 2006

Y1 - 2006

N2 - Cobalt (Co) composition has detrimental effects on the deposition of diamond films on cemented tungsten carbide (WC-Co) substrates. It decreases adhesion of the deposited films to the substrates and causes a transformation of s p3 -bonded diamond to s p2 -bonded graphite. In this study, a KrF excimer laser with a wavelength of 248 nm, a pulse width of 23 ns, and a pulse energy range of 84-450 mJ was used in the combustion-flame method to improve the quality of the deposited diamond films. Scanning electron microscopy, energy dispersive x-ray analysis, and Raman spectroscopy of the deposited films showed that a laser irradiation during combustion-flame deposition of diamond decreased the cobalt composition drastically. Based on the experimental results, the influence of the laser irradiation on the deposition process was analyzed.

AB - Cobalt (Co) composition has detrimental effects on the deposition of diamond films on cemented tungsten carbide (WC-Co) substrates. It decreases adhesion of the deposited films to the substrates and causes a transformation of s p3 -bonded diamond to s p2 -bonded graphite. In this study, a KrF excimer laser with a wavelength of 248 nm, a pulse width of 23 ns, and a pulse energy range of 84-450 mJ was used in the combustion-flame method to improve the quality of the deposited diamond films. Scanning electron microscopy, energy dispersive x-ray analysis, and Raman spectroscopy of the deposited films showed that a laser irradiation during combustion-flame deposition of diamond decreased the cobalt composition drastically. Based on the experimental results, the influence of the laser irradiation on the deposition process was analyzed.

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KrF excimer laser-assisted combustion-flame deposition of diamond films

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