Laser ablation of Si in water and ambient air

S. Zhu, M. H. Hong, M. L. Koh, Y. F. Lu

Research output: Contribution to journalArticlepeer-review

11 Scopus citations


Laser ablation of Si in ambient air and under water is investigated. It is found that the laser ablation rate of Si varies with the thickness of the water layer above the Si substrates. The laser ablation rate is the most highly enhanced with the water layer of 1.1 mm. It is assumed that the plasma generated in water confinement regime (WCR) with an optimal water layer thickness induces the strongest pressure. This high-pressure, high-temperature plasma results in the high ablation rate. A wide-band microphone is used to detect the audible acoustic wave generated during the laser ablation. The amplitude of the acoustic wave is closely related to the ablation rate. It is found that the first peak-to-peak amplitude of the acoustic wave is the strongest when the water layer thickness is 1.1 mm above the substrate. By proper calibration, acoustic wave detection can be used as a real-time monitoring of the laser ablation.

Original languageEnglish (US)
Pages (from-to)39-42
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2002
Externally publishedYes


  • Acoustic wave
  • Laser ablation
  • Real-time monitoring
  • Water confinement regime

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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