Abstract
Modern three-dimensional micro-/nanofabrication requires both additive and subtractive processes. However, these two processes are largely isolated and generally regarded as incompatible with each other. In this chapter we introduce both additive two-photon polymerization and subtractive multiphoton ablation techniques and accomplished simultaneous additive and subtractive fabrication processes using two-photon polymerization followed by femtosecond laser multiphoton ablation. Submicron polymer fibers containing periodic holes (500-nm diameter) and microfluidic channels (1-?m diameter) were successfully fabricated. This method combining both two-photon polymerization and femtosecond laser ablation enables the fabrication of complex three-dimensional micro-/nanostructures and is promising for a wide range of applications such as integrated optics, microfluidics, and microelectromechanical systems.
Original language | English (US) |
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Title of host publication | Laser Additive Manufacturing |
Subtitle of host publication | Materials, Design, Technologies, and Applications |
Publisher | Elsevier Inc. |
Pages | 237-256 |
Number of pages | 20 |
ISBN (Electronic) | 9780081004340 |
ISBN (Print) | 9780081004333 |
DOIs | |
State | Published - 2017 |
Keywords
- 3D micro-/nanofabrication
- Degree of polymerization
- Femtosecond laser direct writing
- Multiphoton ablation
- Raman spectroscopy
- Two-photon polymerization
ASJC Scopus subject areas
- Engineering(all)
- Materials Science(all)