Laser-assisted growth of diamond particulates on a silicon surface from a cyclohexane liquid

Y. F. Lu, S. M. Huang, X. B. Wang, Z. X. Shen

Research output: Contribution to journalArticle

50 Scopus citations

Abstract

Excimer laser irradiation of a single-crystalline silicon surface immersed under cyclohexane liquid is demonstrated to form diamond particulates. Scanning electron microscopy and Raman spectroscopy have been used to study the deposited particulates. A mechanism based on the condensation of energetic carbon atoms into diamond-like films is proposed to explain the process.

Original languageEnglish (US)
Pages (from-to)543-547
Number of pages5
JournalApplied Physics A: Materials Science and Processing
Volume66
Issue number5
DOIs
StatePublished - 1998

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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