Laser-assisted nanopatterning of aluminium using particle-induced near-field optical enhancement and nanoimprinting

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander

Research output: Contribution to journalArticle

12 Scopus citations


Laser-assisted nanopatterning of aluminium (Al) thin films using particle-induced near-field optical enhancement and nanoimprinting has been investigated experimentally and theoretically. It is found that nano pit arrays can be created on Al surfaces by laser irradiation (KrF excimer laser, λ = 248 nm) on an Al surface on which a monolayer of silica particles has been self-assembled. The influence of particle size and laser fluence on the structuring of Al surfaces has been examined. Particles with various diameters of 0.97, 2.34 and 5.06 μm were used in the experiment. Near-field optical enhancement and nanoimprinting were identified to explain the mechanisms for the formation of different structures on Al surfaces under different laser fluences. A high frequency structure simulator (HFSS) was used to simulate the optical field distribution in the particles attached on Al surfaces.

Original languageEnglish (US)
Pages (from-to)1655-1660
Number of pages6
Issue number11
StatePublished - Nov 1 2004


ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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