@inproceedings{b87b47d824964d65830fc720bf45a99b,
title = "Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid",
abstract = "Diamond-like carbon (DLC) films were synthesized by KrF excimer laser irradiation of single-crystal Si substrates immersed in a cyclohexane liquid. The deposition process was performed with a peak laser power density of about 10 8 W/cm 2 in open atmosphere at room temperature. Scanning electron microscopy (SEM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) studies showed diamond-like characteristics of the deposited films. Optical emission spectroscopy (OES) of laser-induced plasmas of cyclohexane indicated decomposition of the cyclohexane molecules. A mechanism based on the dissociation of the cyclohexane molecules and condensation of energetic carbon atoms into diamond-like films was proposed to explain the process.",
keywords = "Cyclohexane, Diamond-like carbon, OES, Raman, SEM, XPS",
author = "Han, {Y. X.} and H. Ling and Lu, {Y. F.} and O'Keefe, {M. J.} and T. McKindra",
year = "2006",
doi = "10.1117/12.644984",
language = "English (US)",
isbn = "0819461490",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
note = "Laser-based Micropackaging ; Conference date: 25-01-2006 Through 26-01-2006",
}