Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid

Y. X. Han, H. Ling, Y. F. Lu, M. J. O'Keefe, T. McKindra

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


Diamond-like carbon (DLC) films were synthesized by KrF excimer laser irradiation of single-crystal Si substrates immersed in a cyclohexane liquid. The deposition process was performed with a peak laser power density of about 10 8 W/cm 2 in open atmosphere at room temperature. Scanning electron microscopy (SEM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) studies showed diamond-like characteristics of the deposited films. Optical emission spectroscopy (OES) of laser-induced plasmas of cyclohexane indicated decomposition of the cyclohexane molecules. A mechanism based on the dissociation of the cyclohexane molecules and condensation of energetic carbon atoms into diamond-like films was proposed to explain the process.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2006
EventLaser-based Micropackaging - San Jose, CA, United States
Duration: Jan 25 2006Jan 26 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceLaser-based Micropackaging
Country/TerritoryUnited States
CitySan Jose, CA


  • Cyclohexane
  • Diamond-like carbon
  • OES
  • Raman
  • SEM
  • XPS

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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