Laser cleaning of IC mould and its real-time monitoring

Yong Feng Lu; Wen Dong Song; Ming Hui Hong; Zhong Min Ren; Qiong Chen; Tow Chong Chong

doi:10.1143/jjap.39.4811

Laser cleaning of IC mould and its real-time monitoring

Yong Feng Lu, Wen Dong Song, Ming Hui Hong, Zhong Min Ren, Qiong Chen, Tow Chong Chong

Electrical & Computer Engineering

Research output: Contribution to journal › Article

13 Scopus citations

Abstract

Laser-induced removal of organic contaminants on IC mould surfaces was studied both experimentally and theoretically. The mould surfaces before and after cleaning were observed under an optical microscope and analyzed by Auger electron spectroscopy (AES). It was found that the contaminants in the irradiated area were effectively removed by pulsed laser irradiation at a laser fluence greater than the cleaning threshold of 100 mJ/cm². The cleaning efficiency increases with increasing laser fluence and the damage threshold of the mould surfaces is about 1.05 J/cm², which is in good agreement with the theoretical damage threshold. We also demonstrated that the acoustic wave detection in real-time can be used to both monitor the surface cleanness during the laser cleaning process and determine the cleaning threshold and cleaning efficiency.

Original language	English (US)
Pages (from-to)	4811-4813
Number of pages	3
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	39
Issue number	8
DOIs	https://doi.org/10.1143/jjap.39.4811
State	Published - Aug 2000

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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Lu, Y. F., Song, W. D., Hong, M. H., Ren, Z. M., Chen, Q., & Chong, T. C. (2000). Laser cleaning of IC mould and its real-time monitoring. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 39(8), 4811-4813. https://doi.org/10.1143/jjap.39.4811

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abstract = "Laser-induced removal of organic contaminants on IC mould surfaces was studied both experimentally and theoretically. The mould surfaces before and after cleaning were observed under an optical microscope and analyzed by Auger electron spectroscopy (AES). It was found that the contaminants in the irradiated area were effectively removed by pulsed laser irradiation at a laser fluence greater than the cleaning threshold of 100 mJ/cm2. The cleaning efficiency increases with increasing laser fluence and the damage threshold of the mould surfaces is about 1.05 J/cm2, which is in good agreement with the theoretical damage threshold. We also demonstrated that the acoustic wave detection in real-time can be used to both monitor the surface cleanness during the laser cleaning process and determine the cleaning threshold and cleaning efficiency.",

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