Laser cleaning of IC mould and its real-time monitoring

Yong Feng Lu, Wen Dong Song, Ming Hui Hong, Zhong Min Ren, Qiong Chen, Tow Chong Chong

Research output: Contribution to journalArticle

13 Scopus citations

Abstract

Laser-induced removal of organic contaminants on IC mould surfaces was studied both experimentally and theoretically. The mould surfaces before and after cleaning were observed under an optical microscope and analyzed by Auger electron spectroscopy (AES). It was found that the contaminants in the irradiated area were effectively removed by pulsed laser irradiation at a laser fluence greater than the cleaning threshold of 100 mJ/cm2. The cleaning efficiency increases with increasing laser fluence and the damage threshold of the mould surfaces is about 1.05 J/cm2, which is in good agreement with the theoretical damage threshold. We also demonstrated that the acoustic wave detection in real-time can be used to both monitor the surface cleanness during the laser cleaning process and determine the cleaning threshold and cleaning efficiency.

Original languageEnglish (US)
Pages (from-to)4811-4813
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume39
Issue number8
DOIs
StatePublished - Aug 2000

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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