Laser cleaning of micro-particles from a solid surface - Theory and applications

Yong Feng Lu, Wen Dong Song, Teck Seng Low

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

In laser cleaning of micro-particles from a solid surface, the adhesion force between the particles and the substrate surface, and the thermal expansion of both particles and substrate play important roles in determining the threshold laser fluence. Taking into account Van der Waals force and cleaning force due to fast thermal expansion of particles and substrate surface induced by pulsed laser irradiation, a cleaning model was established for the removal of tiny particles from substrate surfaces. The cleaning condition and cleaning threshold can be obtained from this model. This model can qualitatively and quantitatively predict the laser cleaning process depending on laser incident direction, laser wavelength, particle size, particle material and substrate material.

Original languageEnglish (US)
Pages (from-to)181-185
Number of pages5
JournalMaterials Chemistry and Physics
Volume54
Issue number1-3
DOIs
StatePublished - Jul 1998
Externally publishedYes

Keywords

  • Adhesion force
  • Cleaning force
  • Cleaning model
  • Cleaning threshold
  • Laser cleaning
  • Particle removal

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

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