Laser cleaning of microparticles - Theoretical prediction of threshold laser fluence

Y. F. Lu, W. D. Song, M. H. Hong, D. S.H. Chan, T. S. Low

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations


A theoretical model for laser cleaning of microparticles from solid surface was established by taking adhesion force and cleaning force into account. The threshold fluence can be obtained from this model and verified by the experimental results. It was found that laser irradiation from the reverse side of transparent substrate is more effective to remove particles than that from the front side. Laser irradiation with shorter wavelength can result in higher cleaning efficiency and lower threshold fluence for removal of particles from solid surfaces.

Original languageEnglish (US)
Pages (from-to)352-357
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1997
Externally publishedYes
EventLasers in Materials Processing - Munich, Germany
Duration: Jun 16 1997Jun 20 1997


  • Cleaning force
  • Cleaning threshold
  • Laser cleaning
  • Microparticles
  • Van der Waals force

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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