Abstract
A theoretical model for laser cleaning of microparticles from solid surface was established by taking adhesion force and cleaning force into account. The threshold fluence can be obtained from this model and verified by the experimental results. It was found that laser irradiation from the reverse side of transparent substrate is more effective to remove particles than that from the front side. Laser irradiation with shorter wavelength can result in higher cleaning efficiency and lower threshold fluence for removal of particles from solid surfaces.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 352-357 |
| Number of pages | 6 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3097 |
| State | Published - 1997 |
| Externally published | Yes |
| Event | Lasers in Materials Processing - Munich, Germany Duration: Jun 16 1997 → Jun 20 1997 |
Keywords
- Cleaning force
- Cleaning threshold
- Laser cleaning
- Microparticles
- Van der Waals force
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering