Laser cleaning of solid surface: optical resonance and near-field effects

B. S. Luk'yanchuk, Y. W. Zheng, Y. F. Lu

Research output: Contribution to journalConference articlepeer-review

76 Scopus citations

Abstract

The optical resonance within the transparent particle with size a approx. λ (radiation wavelength) strongly influences the intensity distribution in the contacted area (substrate surface). As a result, the efficiency of dry laser cleaning is a strong non-monotonous function of the particle size. Another important effect is related to the interaction between scattered and reflected light of the particle on the surface (near-field effect). Examination of these effects is done within the frame of exact solution of the light scattering problem. The distribution of absorbed intensity is the basic input characteristic for the laser cleaning model. It is used during solution of heat equation and equations of theory of the elasticity (thermal expansion and acoustic wave generation). This paper concentrates on the calculations of intensity distributions as a function of typical parameters in laser cleaning.

Original languageEnglish (US)
Pages (from-to)576-587
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4065
DOIs
StatePublished - 2000
Externally publishedYes
EventHigh-Power Laser Ablation III - Santa Fe, NM, USA
Duration: Apr 24 2000Apr 28 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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