Laser cleaning technology and its application

W. D. Song, M. H. Hong, L. Zhang, Y. F. Lu, T. C. Chong

Research output: Contribution to journalConference article

7 Scopus citations

Abstract

Dry and steam laser cleaning was demonstrated to be an efficient cleaning tool for removing particles and film-type contaminants from solid surfaces. The application of laser cleaning technology in semiconductor and disk drive industry was also discussed. It was demonstrated that the cleaning efficiency for steam laser cleaning was higher than for dry laser cleaning.

Original languageEnglish (US)
Pages (from-to)280-283
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4426
DOIs
StatePublished - Jan 1 2002
EventSecond International Symposium on Laser Precision Microfabrication - Singapore, Singapore
Duration: May 16 2001May 18 2001

Keywords

  • Applications
  • Cleaning mechanisms
  • Film-type contaminants
  • Laser cleaning
  • Particles

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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