Abstract
Dry and steam laser cleaning was demonstrated to be an efficient cleaning tool for removing particles and film-type contaminants from solid surfaces. The application of laser cleaning technology in semiconductor and disk drive industry was also discussed. It was demonstrated that the cleaning efficiency for steam laser cleaning was higher than for dry laser cleaning.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 280-283 |
| Number of pages | 4 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4426 |
| DOIs | |
| State | Published - 2002 |
| Externally published | Yes |
| Event | Second International Symposium on Laser Precision Microfabrication - Singapore, Singapore Duration: May 16 2001 → May 18 2001 |
Keywords
- Applications
- Cleaning mechanisms
- Film-type contaminants
- Laser cleaning
- Particles
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering