Laser cleaning technology and its application

W. D. Song, M. H. Hong, L. Zhang, Y. F. Lu, T. C. Chong

Research output: Contribution to journalConference articlepeer-review

10 Scopus citations


Dry and steam laser cleaning was demonstrated to be an efficient cleaning tool for removing particles and film-type contaminants from solid surfaces. The application of laser cleaning technology in semiconductor and disk drive industry was also discussed. It was demonstrated that the cleaning efficiency for steam laser cleaning was higher than for dry laser cleaning.

Original languageEnglish (US)
Pages (from-to)280-283
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2002
Externally publishedYes
EventSecond International Symposium on Laser Precision Microfabrication - Singapore, Singapore
Duration: May 16 2001May 18 2001


  • Applications
  • Cleaning mechanisms
  • Film-type contaminants
  • Laser cleaning
  • Particles

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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