Laser direct writing of graphene patterns

J. B. Park, W. Xiong, Z. Q. Xie, M. Mitchell, Y. Gao, M. Qian, Y. F. Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Rapid growth of single-layer graphene using laser-induced chemical vapor deposition (LCVD) with a visible CW laser (λ = 532 nm) irradiation at room temperature was investigated. In this study, an optically-pumped solid-state laser with a wavelength of 532 nm irradiates a thin nickel foil to induce a local temperature rise, thereby allowing the direct writing of graphene patterns about ∼10 μm in width with high growth rate on precisely controlled positions. It is demonstrated that the fabrication of graphene patterns can be achieved with a single scan for each graphene pattern using LCVD with no annealing or preprocessing of the substrate. The scan speed reaches to about ∼50 um/s, which indicates that the graphene pattern with 1:1 aspect ratio (x:y) can be grown in 0.2 sec. The patterned graphene on nickel was transferred to SiO 2/Si substrate for fabrication of electrical circuits and sensor devices.

Original languageEnglish (US)
Title of host publicationLaser-Material Interactions at Micro/Nanoscales
Pages69-74
Number of pages6
DOIs
StatePublished - 2012
Event2011 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 25 2011Apr 29 2011

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1365
ISSN (Print)0272-9172

Conference

Conference2011 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/25/114/29/11

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Park, J. B., Xiong, W., Xie, Z. Q., Mitchell, M., Gao, Y., Qian, M., & Lu, Y. F. (2012). Laser direct writing of graphene patterns. In Laser-Material Interactions at Micro/Nanoscales (pp. 69-74). (Materials Research Society Symposium Proceedings; Vol. 1365). https://doi.org/10.1557/opl.2011.889