Laser Direct Writing of Ultrahigh Sensitive SiC-Based Strain Sensor Arrays on Elastomer toward Electronic Skins

Yang Gao, Qi Li, Rongyao Wu, Jin Sha, Yongfeng Lu, Fuzhen Xuan

Research output: Contribution to journalArticlepeer-review

149 Scopus citations


Electronic skins (e-skins) have been widely investigated as important platforms for healthcare monitoring, human/machine interfaces, and soft robots. However, mask-free formation of patterned active materials on elastomer substrates without involving high-cost and complicate processes is still a grand challenge in developing e-skins. Here, SiC-based strain sensor arrays are fabricated on elastomer for e-skins by a laser direct writing (LDW) technique, which is mask-free, highly efficient, and scalable. The direct synthesis of active material on elastomer is ascribed to the LDW-induced conversion of siloxanes to SiC. The SiC-based devices own a highest sensitivity of ≈2.47 × 105 achieved at a laser power of 0.8 W and a scanning velocity of 1.25 mm s−1. Moreover, the LDW-developed device provides a minimum strain detection limit of 0.05%, a small temperature drift, and a high mechanical durability for over 10 000 cycles. When it is mounted onto human skins, the SiC-based device is able to monitor external stimuli and human health conditions, with the capability of wireless data transmission. Its potential application in e-skins is further proved by an LDW-fabricated device having 3 × 3 SiC sensor array for tactile sensing.

Original languageEnglish (US)
Article number1806786
JournalAdvanced Functional Materials
Issue number2
StatePublished - Jan 10 2019


  • electronic skin
  • laser direct writing
  • strain sensors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • General Chemistry
  • General Materials Science
  • Electrochemistry
  • Biomaterials


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