Laser-induced removal of fingerprints from glass and quartz surfaces

Yong Feng Lu, Shuji Komuro, Yoshinobu Aoyagi

Research output: Contribution to journalArticlepeer-review

19 Scopus citations


Laser removal of fingerprints from glass and quartz surfaces was studied using laser irradiation in air. The KrF excimer laser, continuous wave (CW) CO2 laser and pulsed CO2 laser were used in the investigation. Electron probe microanalysis (EPMA) was performed to characterize the substrate surfaces before and after laser cleaning. It is found that short wavelength and pulse width are necessary for fingerprint removal. EPMA measurements show that KrF excimer laser irradiation can effectively remove fingerprints from glass and quartz surfaces with a few pulses if the pulse energy density is sufficiently high. In the laser removal of fingerprints from quartz surfaces, it is found that the irradiation direction of the incident laser pulse can cause significant differences in the cleaning effect for laser irradiations from the front or back. CO2 laser irradiation, either in CW or pulse form, cannot effectively remove fingerprints.� 1994, (publisher). All rights reserved.

Original languageEnglish (US)
Pages (from-to)4691-4696
Number of pages6
JournalJapanese Journal of Applied Physics
Issue number8 R
StatePublished - Aug 1994
Externally publishedYes


  • CW and pulsed CO laser
  • Excimer laser
  • Fingerprint removal
  • Laser cleaning
  • Photon momentum effect

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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