Laser-induced removal of plate-like particles from solid surfaces

W. D. Song, M. H. Hong, H. L. Koh, W. J. Wang, Y. W. Zheng, Y. F. Lu, T. C. Chong

Research output: Contribution to journalConference articlepeer-review

14 Scopus citations


Laser-induced removal of plate-like particles from solid surfaces has been studied both experimentally and theoretically. A theoretical model has been established by taking into account adhesion force, cleaning force and heat equation. The cleaning condition and threshold can be obtained by comparing adhesion force and cleaning force. The theoretical analysis shows that the cleaning force increases with increasing laser fluence, which leads to high cleaning efficiency. Laser cleaning from the reverse-side is more effective in removing plate-like particles than from the front-side. Theoretical predictions have been verified by the experimental results for removing plate-like particles from quartz substrates. A comparison of cleaning two types of particles is addressed.

Original languageEnglish (US)
Pages (from-to)69-74
Number of pages6
JournalApplied Surface Science
Issue number1-4
StatePublished - Jan 28 2002
Externally publishedYes
EventProceedings of the European Materials Research Society 2001 Symposium - Strasbourg, France
Duration: Jun 5 2001Jun 5 2001


  • Adhesion forces
  • Cleaning force
  • Cleaning model
  • Laser cleaning
  • Plate-like particles

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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