Laser microfabrication of transparent hard materials and signal diagnostics

M. H. Hong, K. Sugioka, Y. F. Lu, K. Midorikawa, T. C. Chong

Research output: Contribution to journalConference articlepeer-review

23 Scopus citations

Abstract

Laser-induced-plasma-assisted ablation (LIPAA) for glass microfabrication is investigated. A short pulse laser is applied to ablate a glass substrate. With proper control of laser parameters, surface microprocessing of the glass can be achieved. The laser beam goes through the substrate first and then irradiates a target beneath. For laser fluences above ablation threshold of the target, the target plasma flies toward the substrate at a high speed. At a short target-to-substrate distance, there are strong interactions among the target plasma, incident laser beam and glass substrate at its backside surface to induce ablation of the glass. A ultrafast phototube and optical emission spectrum analyzer are applied to study the dynamic interaction. From the signal diagnostics and analyses, laser-induced glass microfabrication can be monitored in real time.

Original languageEnglish (US)
Pages (from-to)556-561
Number of pages6
JournalApplied Surface Science
Volume186
Issue number1-4
DOIs
StatePublished - Jan 28 2002
Externally publishedYes
EventProceedings of the European Materials Research Society 2001 Symposium - Strasbourg, France
Duration: Jun 5 2001Jun 5 2001

Keywords

  • Glass microfabrication
  • Laser-induced-plasma-assisted ablation
  • Signal diagnostics

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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