Laser microprocessing and the applications in microelectronics industry

Y. F. Lu, Z. M. Ren

Research output: Contribution to journalConference article

7 Scopus citations

Abstract

Laser microprocessing technology has been applied to industries in a number of aspects: (1) laser cleaning, laser deflash and plasma-assisted laser microprocessing, (2) laser texturing, laser bumping and related technologies (3) real-time monitoring of laser surface processing, (4) laser-induced controllable periodic structures and (5) laser nano-etching and nanolithography by tip-enhanced laser irradiation.

Original languageEnglish (US)
Pages (from-to)191-199
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4157
DOIs
StatePublished - 2001
EventLaser-Assisted Microtechnology 2000 - St. Petersburg-Pushkin, Russian Federation
Duration: Aug 23 2000Aug 25 2000

Keywords

  • Laser bumping
  • Laser cleaning
  • Laser microprocessing
  • Laser nanoprocessing
  • Laser texturing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Laser microprocessing and the applications in microelectronics industry'. Together they form a unique fingerprint.

  • Cite this