Abstract
Laser microprocessing technology has been applied to industries in a number of aspects: (1) laser cleaning, laser deflash and plasma-assisted laser microprocessing, (2) laser texturing, laser bumping and related technologies (3) real-time monitoring of laser surface processing, (4) laser-induced controllable periodic structures and (5) laser nano-etching and nanolithography by tip-enhanced laser irradiation.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 191-199 |
| Number of pages | 9 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4157 |
| DOIs | |
| State | Published - 2001 |
| Externally published | Yes |
| Event | Laser-Assisted Microtechnology 2000 - St. Petersburg-Pushkin, Russian Federation Duration: Aug 23 2000 → Aug 25 2000 |
Keywords
- Laser bumping
- Laser cleaning
- Laser microprocessing
- Laser nanoprocessing
- Laser texturing
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering