Laser nanofabrication beyond the diffraction limit

Y. F. Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Laser material processing demonstrated its significance in many areas such as microelectronics, data storage, photonics and nanotechnology, since versatile laser sources provide flexible and unique energy source for precise control of material processing. To achieve nanoscale laser material machining and processing, we need to overcome the diffraction limit of the laser wavelengths. Recently, different approaches have been explored to overcome the diffraction limit and to achieve feature sizes down to 10 nm order, way beyond the diffraction limits. This paper will provide an overview in the areas of laser-based nanoscale machining and processing, including the author's own research experience on laser-assisted scanning probe microscope, superfocusing by optical resonance in spherical particles, laser nanoimprinting, laser synthesis of quantum dots, laser annealing of ultrashow pn junctions, nanometer-order film thickness detection using rotational Raman spectroscopy, and laser cleaning of nanoparticles.

Original languageEnglish (US)
Title of host publicationPhotonic Applications Systems Technologies Conference, PhAST 2005
PublisherOptical Society of America
ISBN (Print)1557527709, 9781557527707
StatePublished - 2005
EventPhotonic Applications Systems Technologies Conference, PhAST 2005 - Baltimore, MD, United States
Duration: May 23 2005May 23 2005

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


ConferencePhotonic Applications Systems Technologies Conference, PhAST 2005
Country/TerritoryUnited States
CityBaltimore, MD

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics


Dive into the research topics of 'Laser nanofabrication beyond the diffraction limit'. Together they form a unique fingerprint.

Cite this