Laser-power-resolved excitations of ethylene molecules in laserassisted synthesis of diamond films

Z. Q. Xie; X. N. He; W. Hu; Y. Gao; T. Guillemet; J. B. Park; Y. S. Zhou; Y. F. Lu

doi:10.2351/1.5062204

Laser-power-resolved excitations of ethylene molecules in laserassisted synthesis of diamond films

Z. Q. Xie, X. N. He, W. Hu, Y. Gao, T. Guillemet, J. B. Park, Y. S. Zhou, Y. F. Lu

Research output: Contribution to conference › Paper › peer-review

Abstract

Laser-power-resolved excitations of precursor molecules in laser-assisted synthesis of diamond films using a wavelength-tunable CO₂ laser were studied. The wavelength of the CO₂ laser was tuned to 10.532 μm to match a vibration mode of a precursor molecule, ethylene (C₂H ₄). The density of the incident laser power was adjusted to modify diamond crystal orientation, optimize diamond quality, and achieve high-efficiency laser energy coupling. It was observed that at incident laser power densities between 5×10³ and 1.0×10⁴ W/cm², (100)-faceted diamond crystals were grown uniformly in the center areas of the diamond films. Higher incident laser powers, although further promoted growth rate, suppressed the uniformity of the diamond (100) facets. Best diamond quality was obtained within a laser power density range of 5×10³ ∼ 6.7×103 W/cm2, whereas the highest energy efficiency was achieved within a laser power density range of 3.3×10 ³∼ 6.7×10³ W/cm². The effects of the resonant laser energy coupling were investigated using optical emission spectroscopy.

Original language	English (US)
Pages	1211-1216
Number of pages	6
DOIs	https://doi.org/10.2351/1.5062204
State	Published - 2011
Externally published	Yes
Event	30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011 - Orlando, FL, United States Duration: Oct 23 2011 → Oct 27 2011

Conference

Conference	30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011
Country/Territory	United States
City	Orlando, FL
Period	10/23/11 → 10/27/11

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

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10.2351/1.5062204

Cite this

Xie, Z. Q., He, X. N., Hu, W., Gao, Y., Guillemet, T., Park, J. B., Zhou, Y. S., & Lu, Y. F. (2011). Laser-power-resolved excitations of ethylene molecules in laserassisted synthesis of diamond films. 1211-1216. Paper presented at 30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011, Orlando, FL, United States. https://doi.org/10.2351/1.5062204

Xie, ZQ, He, XN, Hu, W, Gao, Y, Guillemet, T, Park, JB, Zhou, YS & Lu, YF 2011, 'Laser-power-resolved excitations of ethylene molecules in laserassisted synthesis of diamond films', Paper presented at 30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011, Orlando, FL, United States, 10/23/11 - 10/27/11 pp. 1211-1216. https://doi.org/10.2351/1.5062204

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title = "Laser-power-resolved excitations of ethylene molecules in laserassisted synthesis of diamond films",

abstract = "Laser-power-resolved excitations of precursor molecules in laser-assisted synthesis of diamond films using a wavelength-tunable CO2 laser were studied. The wavelength of the CO2 laser was tuned to 10.532 μm to match a vibration mode of a precursor molecule, ethylene (C2H 4). The density of the incident laser power was adjusted to modify diamond crystal orientation, optimize diamond quality, and achieve high-efficiency laser energy coupling. It was observed that at incident laser power densities between 5×103 and 1.0×104 W/cm2, (100)-faceted diamond crystals were grown uniformly in the center areas of the diamond films. Higher incident laser powers, although further promoted growth rate, suppressed the uniformity of the diamond (100) facets. Best diamond quality was obtained within a laser power density range of 5×103 ∼ 6.7×103 W/cm2, whereas the highest energy efficiency was achieved within a laser power density range of 3.3×10 3∼ 6.7×103 W/cm2. The effects of the resonant laser energy coupling were investigated using optical emission spectroscopy.",

author = "Xie, {Z. Q.} and He, {X. N.} and W. Hu and Y. Gao and T. Guillemet and Park, {J. B.} and Zhou, {Y. S.} and Lu, {Y. F.}",

year = "2011",

doi = "10.2351/1.5062204",

language = "English (US)",

pages = "1211--1216",

note = "30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011 ; Conference date: 23-10-2011 Through 27-10-2011",

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AU - Xie, Z. Q.

AU - He, X. N.

AU - Hu, W.

AU - Gao, Y.

AU - Guillemet, T.

AU - Park, J. B.

AU - Zhou, Y. S.

AU - Lu, Y. F.

PY - 2011

Y1 - 2011

N2 - Laser-power-resolved excitations of precursor molecules in laser-assisted synthesis of diamond films using a wavelength-tunable CO2 laser were studied. The wavelength of the CO2 laser was tuned to 10.532 μm to match a vibration mode of a precursor molecule, ethylene (C2H 4). The density of the incident laser power was adjusted to modify diamond crystal orientation, optimize diamond quality, and achieve high-efficiency laser energy coupling. It was observed that at incident laser power densities between 5×103 and 1.0×104 W/cm2, (100)-faceted diamond crystals were grown uniformly in the center areas of the diamond films. Higher incident laser powers, although further promoted growth rate, suppressed the uniformity of the diamond (100) facets. Best diamond quality was obtained within a laser power density range of 5×103 ∼ 6.7×103 W/cm2, whereas the highest energy efficiency was achieved within a laser power density range of 3.3×10 3∼ 6.7×103 W/cm2. The effects of the resonant laser energy coupling were investigated using optical emission spectroscopy.

AB - Laser-power-resolved excitations of precursor molecules in laser-assisted synthesis of diamond films using a wavelength-tunable CO2 laser were studied. The wavelength of the CO2 laser was tuned to 10.532 μm to match a vibration mode of a precursor molecule, ethylene (C2H 4). The density of the incident laser power was adjusted to modify diamond crystal orientation, optimize diamond quality, and achieve high-efficiency laser energy coupling. It was observed that at incident laser power densities between 5×103 and 1.0×104 W/cm2, (100)-faceted diamond crystals were grown uniformly in the center areas of the diamond films. Higher incident laser powers, although further promoted growth rate, suppressed the uniformity of the diamond (100) facets. Best diamond quality was obtained within a laser power density range of 5×103 ∼ 6.7×103 W/cm2, whereas the highest energy efficiency was achieved within a laser power density range of 3.3×10 3∼ 6.7×103 W/cm2. The effects of the resonant laser energy coupling were investigated using optical emission spectroscopy.

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ER -

Laser-power-resolved excitations of ethylene molecules in laserassisted synthesis of diamond films

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