Laser-power-resolved excitations of ethylene molecules in laserassisted synthesis of diamond films

Z. Q. Xie, X. N. He, W. Hu, Y. Gao, T. Guillemet, J. B. Park, Y. S. Zhou, Y. F. Lu

Research output: Contribution to conferencePaperpeer-review

Abstract

Laser-power-resolved excitations of precursor molecules in laser-assisted synthesis of diamond films using a wavelength-tunable CO2 laser were studied. The wavelength of the CO2 laser was tuned to 10.532 μm to match a vibration mode of a precursor molecule, ethylene (C2H 4). The density of the incident laser power was adjusted to modify diamond crystal orientation, optimize diamond quality, and achieve high-efficiency laser energy coupling. It was observed that at incident laser power densities between 5×103 and 1.0×104 W/cm2, (100)-faceted diamond crystals were grown uniformly in the center areas of the diamond films. Higher incident laser powers, although further promoted growth rate, suppressed the uniformity of the diamond (100) facets. Best diamond quality was obtained within a laser power density range of 5×103 ∼ 6.7×103 W/cm2, whereas the highest energy efficiency was achieved within a laser power density range of 3.3×10 3∼ 6.7×103 W/cm2. The effects of the resonant laser energy coupling were investigated using optical emission spectroscopy.

Original languageEnglish (US)
Pages1211-1216
Number of pages6
DOIs
StatePublished - 2011
Event30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011 - Orlando, FL, United States
Duration: Oct 23 2011Oct 27 2011

Conference

Conference30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011
CountryUnited States
CityOrlando, FL
Period10/23/1110/27/11

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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