Laser singulation of IC packages

Chengwu An, Kaidong Ye, Yuan Yuan, Minghui Hong, Yongfeng Lu

Research output: Contribution to journalConference article

4 Scopus citations

Abstract

The separation of IC packages from a BGA board is realized by means of laser multi-scan method. The laser used in the study is a double frequency Nd-YAG laser with wavelength of 532 nm. The big problem in the laser processing approach mainly arises from the multi-layer materials of BGA board with copper, polyethylene and epoxy glass fiber, because of their different absorption coefficient to the laser beam and their different heat conductivity. In the experiment approach, the effects of laser parameters, such as wavelength, on the dicing efficiency has been investigated for choosing laser. The influence of sample side for laser incidence on cut profile and, the influence of the focused extent of laser beam on singulation speed are discussed. The experimental results show that laser singulation of IC packages is efficient and reliable.

Original languageEnglish (US)
Pages (from-to)371-373
Number of pages3
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4426
DOIs
StatePublished - 2002
EventSecond International Symposium on Laser Precision Microfabrication - Singapore, Singapore
Duration: May 16 2001May 18 2001

Keywords

  • IC package
  • Laser machining
  • Multi-layer material cutting
  • Multi-scan
  • Singulation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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