Laser surface cleaning and real-time monitoring

Y. F. Lu, W. D. Song, H. M. Hong, Y. W. Zheng

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations


Laser cleaning has emerged as an effective cleaning technique for removing contaminants from solid surfaces. Dry laser cleaning and steam laser cleaning have been developed recently, relying on pulsed laser heating of the surface without and with the presence of a thin liquid coating. Two cleaning models from the viewpoint of force and energy for dry laser cleaning and a cleaning model for steam laser cleaning were established for removal of particles from solid surfaces by taking Van der Waals force, capillary force and cleaning force into account. The models not only explain the influence of laser fluence on cleaning efficiency, but also predict the cleaning thresholds. Laser-induced removal of film-type contaminants has been studied and the surface cleanliness can be monitored in real time by acoustic and electric means.

Original languageEnglish (US)
Pages (from-to)331-337
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2000
Externally publishedYes
EventALT '99 International Conference on 'Advanced Laser Technologies - Potenza-Lecce, Italy
Duration: Sep 20 1999Sep 24 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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