Laser surface cleaning in air: Mechanisms and applications

Yong Feng Lu, Yoshinobu Aoyagi, Mikio Takai, Susumu Namba

Research output: Contribution to journalArticlepeer-review

13 Scopus citations


Surface contaminations are removed by laser irradiation with pulse output and short wavelength in ambient air. It is a dry cleaning process to remove surface contaminations without using ultrasonic cleaning requiring carbon fluorochloride and other organic solvents. The mechanisms of laser cleaning may include laser photodecomposition, laser ablation and surface vibration due to the impact of the laser pulse. Examples of cleaning metal surfaces and magnetic head sliders show that this cleaning process could be widely used in various industrial applications.

Original languageEnglish (US)
Pages (from-to)713
Number of pages1
JournalJapanese Journal of Applied Physics
Issue number12S
StatePublished - Dec 1994
Externally publishedYes


  • CFC-free cleaning
  • Cleaning of magnetic head sliders
  • Dry process
  • Laser cleaning
  • Metal surface cleaning
  • Surface cleaning
  • UV pulse laser

ASJC Scopus subject areas

  • General Engineering
  • General Physics and Astronomy


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