Laser surface cleaning in air: Mechanisms and applications

Yong Feng Lu; Yoshinobu Aoyagi; Mikio Takai; Susumu Namba

doi:10.1143/JJAP.33.7138

Laser surface cleaning in air: Mechanisms and applications

Yong Feng Lu, Yoshinobu Aoyagi, Mikio Takai, Susumu Namba

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

Surface contaminations are removed by laser irradiation with pulse output and short wavelength in ambient air. It is a dry cleaning process to remove surface contaminations without using ultrasonic cleaning requiring carbon fluorochloride and other organic solvents. The mechanisms of laser cleaning may include laser photodecomposition, laser ablation and surface vibration due to the impact of the laser pulse. Examples of cleaning metal surfaces and magnetic head sliders show that this cleaning process could be widely used in various industrial applications.

Original language	English (US)
Pages (from-to)	713
Number of pages	1
Journal	Japanese Journal of Applied Physics
Volume	33
Issue number	12S
DOIs	https://doi.org/10.1143/JJAP.33.7138
State	Published - Dec 1994
Externally published	Yes

Keywords

CFC-free cleaning
Cleaning of magnetic head sliders
Dry process
Laser cleaning
Metal surface cleaning
Surface cleaning
UV pulse laser

ASJC Scopus subject areas

General Engineering
General Physics and Astronomy

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10.1143/JJAP.33.7138

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title = "Laser surface cleaning in air: Mechanisms and applications",

abstract = "Surface contaminations are removed by laser irradiation with pulse output and short wavelength in ambient air. It is a dry cleaning process to remove surface contaminations without using ultrasonic cleaning requiring carbon fluorochloride and other organic solvents. The mechanisms of laser cleaning may include laser photodecomposition, laser ablation and surface vibration due to the impact of the laser pulse. Examples of cleaning metal surfaces and magnetic head sliders show that this cleaning process could be widely used in various industrial applications.",

keywords = "CFC-free cleaning, Cleaning of magnetic head sliders, Dry process, Laser cleaning, Metal surface cleaning, Surface cleaning, UV pulse laser",

author = "Lu, {Yong Feng} and Yoshinobu Aoyagi and Mikio Takai and Susumu Namba",

year = "1994",

month = dec,

doi = "10.1143/JJAP.33.7138",

language = "English (US)",

volume = "33",

pages = "713",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

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TY - JOUR

T1 - Laser surface cleaning in air

T2 - Mechanisms and applications

AU - Lu, Yong Feng

AU - Aoyagi, Yoshinobu

AU - Takai, Mikio

AU - Namba, Susumu

PY - 1994/12

Y1 - 1994/12

N2 - Surface contaminations are removed by laser irradiation with pulse output and short wavelength in ambient air. It is a dry cleaning process to remove surface contaminations without using ultrasonic cleaning requiring carbon fluorochloride and other organic solvents. The mechanisms of laser cleaning may include laser photodecomposition, laser ablation and surface vibration due to the impact of the laser pulse. Examples of cleaning metal surfaces and magnetic head sliders show that this cleaning process could be widely used in various industrial applications.

AB - Surface contaminations are removed by laser irradiation with pulse output and short wavelength in ambient air. It is a dry cleaning process to remove surface contaminations without using ultrasonic cleaning requiring carbon fluorochloride and other organic solvents. The mechanisms of laser cleaning may include laser photodecomposition, laser ablation and surface vibration due to the impact of the laser pulse. Examples of cleaning metal surfaces and magnetic head sliders show that this cleaning process could be widely used in various industrial applications.

KW - CFC-free cleaning

KW - Cleaning of magnetic head sliders

KW - Dry process

KW - Laser cleaning

KW - Metal surface cleaning

KW - Surface cleaning

KW - UV pulse laser

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JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

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ER -

Laser surface cleaning in air: Mechanisms and applications

Abstract

Keywords

ASJC Scopus subject areas

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